Wafer carrier

Abstract

A wafer carrier. The wafer carrier includes a container and a plate, wherein the container has an inner wall and the plate is disposed in the vicinity of the inner wall of an upper portion of the container.

1 . A wafer carrier, comprising:
 a container having an inner wall; and   a plate disposed in the vicinity of the inner wall of an upper portion of the container.   
   
   
       2 . The wafer carrier as claimed in  claim 1 , wherein the container is a front opening unified pod. 
   
   
       3 . The wafer carrier as claimed in  claim 2 , wherein the container contains up to twenty-five wafers. 
   
   
       4 . The wafer carrier as claimed in  claim 2 , wherein the plate comprises quartz. 
   
   
       5 . The wafer carrier as claimed in  claim 2 , wherein the plate comprises PVDF. 
   
   
       6 . The wafer carrier as claimed in  claim 2 , wherein the plate comprises silicon. 
   
   
       7 . The wafer carrier as claimed in  claim 2 , wherein the plate comprises ceramic. 
   
   
       8 . The wafer carrier as claimed in  claim 1 , wherein the container comprises poly carbonate. 
   
   
       9 . A wafer carrier, comprising:
 a container having an inner wall; and   a layer coated on at least an upper portion of the inner wall.   
   
   
       10 . The wafer carrier as claimed in  claim 9 , wherein the layer is a TiO 2  film. 
   
   
       11 . The wafer carrier as claimed in  claim 9 , wherein the container comprises poly carbonate. 
   
   
       12 . The wafer carrier as claimed in  claim 9 , wherein the container is a front opening unified pod. 
   
   
       13 . The wafer carrier as claimed in  claim 12 , wherein the container contains up to twenty-five wafers. 
   
   
       14 . The wafer carrier as claimed in  claim 9 , wherein the layer is coated by chemical vapor deposition process. 
   
   
       15 . The wafer carrier as claimed in  claim 9 , wherein the layer is coated by sputtering process. 
   
   
       16 . A wafer carrier, comprising:
 a container, having an inner wall, holding a wafer; and a plate disposed in the container and located between the inner wall and the wafer.   
   
   
       17 . The wafer carrier as claimed in  claim 16 , wherein the plate comprises quartz. 
   
   
       18 . The wafer carrier as claimed in  claim 16 , wherein the plate comprises PVDF. 
   
   
       19 . The wafer carrier as claimed in  claim 16 , wherein the plate comprises silicon. 
   
   
       20 . The wafer carrier as claimed in  claim 17 , wherein the container comprises poly carbonate.