Cooling block forming electrode

Abstract

The present invention is a cooling block that forms an electrode for generating a plasma for use in a plasma process, and includes a channel for a cooling liquid, the cooling block comprising: a first base material and a second base material respectively made of aluminum, at least one of the first and second base materials having a recess for forming a channel for a cooling liquid; and a diffusion bonding layer, in which zinc is diffused in aluminum, and an anti-corrosion layer of a zinc oxide film, the layers being formed by interposing zinc between the first and second base materials, and by bonding the first and second base materials with zinc interposed therebetween in a heating atmosphere containing oxygen.

1 . A cooling block that forms an electrode for generating a plasma for use in a plasma process, and that includes a channel for a cooling liquid, the cooling block comprising: 
 a first base material and a second base material respectively made of aluminum, at least one of the first and second base materials having a recess for forming a channel for a cooling liquid; and    a diffusion bonding layer, in which zinc is diffused in aluminum, and an anti-corrosion layer of a zinc oxide film, the layers being formed by interposing zinc between the first and second base materials, and by bonding the first and second base materials with zinc interposed therebetween in a heating atmosphere containing oxygen.    
   
   
       2 . The cooling block according to  claim 1 , wherein 
 an amount of zinc contained in the zinc oxide film is 30 g or more per 1 m 2 .    
   
   
       3 . The cooling block according to  claim 1 , wherein 
 a brazing material selected from nickel, silicon, copper, boron, phosphorus, chrome, iron and carbon is further interposed between the first and second base materials.    
   
   
       4 . The cooling block according to  claim 1 , wherein 
 the cooling block has a plurality of gas supply holes passing therethrough in a thickness direction, and provides an upper electrode opposed to a lower electrode on which an object to be processed is placed.    
   
   
       5 . A cooling block that forms an electrode for generating plasma for use in a plasma process, and that includes a channel for a cooling liquid, the cooling block comprising: 
 a first base material and a second base material respectively made of aluminum, at least one of the first and second base materials having a recess for forming a channel for a cooling liquid;    a first stainless plate bonded to the first base material;    a second stainless plate bonded to the second base material; and    a diffusion bonding layer of stainless and stainless formed at a position where the first stainless plate and the second stainless plate are bonded to each other, the diffusion bonding layer being formed by bonding the first base material, the second base material, the first stainless plate, and second stainless plate, with the first and second stainless plates being opposed and in tight contact with each other; wherein    a diffusion boding layer of stainless and aluminum is formed at a position where the first aluminum base material and the first stainless plate are bonded to each other, and    a diffusion bonding layer of stainless and aluminum is formed at a position where the second aluminum base material and the second stainless plate are bonded to each other.    
   
   
       6 . The cooling block according to  claim 5 , wherein 
 the cooling block has a plurality of gas supply holes passing therethrough in a thickness direction, and provides an upper electrode opposed to a lower electrode on which an object to be processed is placed.    
   
   
       7 . The cooling block according to  claim 6 , wherein 
 an inner peripheral surface of each gas supply hole is coated with the first and/or second base material.    
   
   
       8 . A plasma processing apparatus comprising: 
 a process vessel whose inside can be hermetically maintained;    a stage disposed in the process vessel to hold thereon a substrate to be plasma-processed, the stage also serving as an electrode;    an electrode having a cooling block according to  claim 1 , the electrode having the cooling block being disposed in the process vessel to be opposed to the stage;    a gas supply part for introducing a process gas into the process vessel; and    a plasma generating means that forms a radio-frequency electric field between the stage and the electrode having the cooling block to make the process gas plasma.    
   
   
       9 . The plasma processing apparatus according to  claim 8 , wherein 
 an amount of zinc contained in the zinc oxide film is 30 g or more per 1 m 2 .    
   
   
       10 . A method of manufacturing a cooling block that forms an electrode for generating a plasma for used in a plasma process, the method comprising the steps of: 
 preparing a first base material and a second base material respectively made of aluminum, at least one of the first and second base materials having a recess for forming a channel for a cooling liquid;    forming simultaneously a diffusion bonding layer, in which zinc is diffused in aluminum, and an anti-corrosion layer of a zinc oxide film, by interposing zinc between the first and second base materials and by bonding the first and second base materials with zinc interposed therebetween in a heating atmosphere containing oxygen.