Assignee
ISHIDA TOSHIFUMI
JP·2 granted patents·1 pending application·4 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0178US8319141B2Cooling block forming electrodeISHIDA TOSHIFUMI·Filed 2010·Granted Nov 27, 2012·4 cites·5 claims
- 0246US2007210037A1Cooling block forming electrodeISHIDA TOSHIFUMI·Filed 2007·Application pending·0 cites
- 0342US9177839B2Cover part, process gas diffusing and supplying unit, and substrate processing apparatusISHIDA TOSHIFUMI·Filed 2009·Granted Nov 3, 2015·0 cites·9 claims
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