Reflective spatial light modulator

Abstract

A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

1 - 7 . (canceled)  
   
   
       8 . An array of a plurality of micro mirrors, comprising: 
 a frame with walls defining a plurality of cavities, each cavity corresponding to one of the plurality of micro mirrors;    a plurality of mirror plates defining an upper side of the plurality of cavities;    a plurality of hinges, each hinge connected to at least one wall of the frame and connected to a mirror plate of the plurality of mirror plates for allowing that mirror plate to rotate relative to the frame about an axis defined by the hinge; and    wherein the frame, the plurality of mirror plates, and the plurality of hinges are fabricated from a single continuous piece of material.    
   
   
       9 . The array of  claim 8 , wherein the mirror plates each have an upper surface.  
   
   
       10 . The array of  claim 9 , wherein the upper surfaces of the mirror plates are polished to reflect light.  
   
   
       11 . The array of  claim 9 , wherein a reflective layer is deposited on each upper surface of the mirror plates for reflecting light.  
   
   
       12 . The array of  claim 8 , further comprising a control substrate connected to the spacer support frame and having at least one electrode corresponding to each of the plurality of mirror plates for receiving a voltage to controllably deflect the mirror plate of the micro mirror.  
   
   
       13 . The array of  claim 12 , wherein the hinge divides the mirror plate into a first part and a second part, such that when the first part of the mirror plate moves toward the control substrate as the mirror plate rotates about the axis defined by the hinge, the second part of the mirror plate moves away from the control substrate.  
   
   
       14 . The array of  claim 12 , wherein the control substrate further comprises addressing and control circuitry for selectively applying voltages to a plurality of electrodes to selectively controllably deflect the mirror plates in the array.  
   
   
       15 . The array of  claim 8 , wherein the surfaces of the plates in the mirror array make up at least 85% of the surface area of the array.  
   
   
       16 . The array of  claim 8 , wherein the surfaces of the plates in the mirror array make up at least 90% of the surface area of the array.  
   
   
       17 - 20 . (canceled)