Assignee
MIRADIA INC
US·75 granted patents·9 pending applications·961 citations·filing 2003–2014
Top patents by PatentIndex Score
84 records- 0195US7477440B1Reflective spatial light modulator having dual layer electrodes and method of fabricating sameMIRADIA INC·Filed 2006·Granted Jan 13, 2009·70 cites·17 claims
- 0295US7184195B2Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulatorMIRADIA INC·Filed 2005·Granted Feb 27, 2007·110 cites·13 claims
- 0395US6992810B2High fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2004·Granted Jan 31, 2006·87 cites·35 claims
- 0492US7616370B2Preferentially deposited lubricant to prevent anti-stiction in micromechanical systemsMIRADIA INC·Filed 2006·Granted Nov 10, 2009·25 cites·12 claims
- 0592US7068417B2Method and apparatus for a reflective spatial light modulator with a flexible pedestalMIRADIA INC·Filed 2004·Granted Jun 27, 2006·55 cites·22 claims
- 0691US7763489B2Method of forming a micromechanical system containing a microfluidic lubricant channelMIRADIA INC·Filed 2006·Granted Jul 27, 2010·25 cites·8 claims
- 0791US7463404B2Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systemsMIRADIA INC·Filed 2006·Granted Dec 9, 2008·20 cites·18 claims
- 0891US7034984B2Fabrication of a high fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2004·Granted Apr 25, 2006·68 cites·51 claims
- 0990US7948000B2Method and system for hermetically sealing packages for opticsMIRADIA INC·Filed 2007·Granted May 24, 2011·14 cites·15 claims
- 1090US7471439B2Process of forming a micromechanical system containing an anti-stiction gas-phase lubricantMIRADIA INC·Filed 2005·Granted Dec 30, 2008·19 cites·25 claims
- 1189US7723812B2Preferentially deposited lubricant to prevent anti-stiction in micromechanical systemsMIRADIA INC·Filed 2006·Granted May 25, 2010·18 cites·28 claims
- 1289US7372615B2Method of operating a micromechanical device that contains anti-stiction gas-phase lubricantMIRADIA INC·Filed 2006·Granted May 13, 2008·19 cites·23 claims
- 1388US7952786B2Method of operating a micromechanical device that contains anti-stiction gas-phase lubricantMIRADIA INC·Filed 2008·Granted May 31, 2011·14 cites·6 claims
- 1488US7430359B2Micromechanical system containing a microfluidic lubricant channelMIRADIA INC·Filed 2006·Granted Sep 30, 2008·20 cites·20 claims
- 1586US7382513B2Spatial light modulator with multi-layer landing structuresMIRADIA INC·Filed 2005·Granted Jun 3, 2008·16 cites·12 claims
- 1686US7245416B2Fabrication of a high fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2006·Granted Jul 17, 2007·13 cites·23 claims
- 1785US7580174B2Anti-stiction gas-phase lubricant for micromechanical systemsMIRADIA INC·Filed 2005·Granted Aug 25, 2009·16 cites·20 claims
- 1885US7042619B1Mirror structure with single crystal silicon cross-memberMIRADIA INC·Filed 2004·Granted May 9, 2006·35 cites·37 claims
- 1985US7022245B2Fabrication of a reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Apr 4, 2006·23 cites·11 claims
- 2084US8361331B2MEMS mirror system for laser printing applicationsMIRADIA INC·Filed 2011·Granted Jan 29, 2013·6 cites·18 claims
- 2184US7671461B2Method and system for hermetically sealing packages for opticsMIRADIA INC·Filed 2006·Granted Mar 2, 2010·8 cites·36 claims
- 2284US7265027B2Bond method and structure using selective application of spin on glassMIRADIA INC·Filed 2005·Granted Sep 4, 2007·11 cites·20 claims
- 2381US7443568B2Method and system for resonant operation of a reflective spatial light modulatorMIRADIA INC·Filed 2006·Granted Oct 28, 2008·11 cites·36 claims
- 2481US7172921B2Method and structure for forming an integrated spatial light modulatorMIRADIA INC·Filed 2005·Granted Feb 6, 2007·10 cites·20 claims
- 2580US7764535B2Low power, small size SRAM architectureMIRADIA INC·Filed 2008·Granted Jul 27, 2010·14 cites·21 claims
- 2680US7142349B2Method and structure for reducing parasitic influences of deflection devices on spatial light modulatorsMIRADIA INC·Filed 2005·Granted Nov 28, 2006·11 cites·13 claims
- 2779US7233428B2Method and apparatus for a reflective spatial light modulator with a flexible pedestalMIRADIA INC·Filed 2006·Granted Jun 19, 2007·8 cites·30 claims
- 2879US7118234B2Reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Oct 10, 2006·15 cites·18 claims
- 2979US7092140B2Architecture of a reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Aug 15, 2006·18 cites·21 claims
- 3077US7723144B2Method and system for flip chip packaging of micro-mirror devicesMIRADIA INC·Filed 2008·Granted May 25, 2010·7 cites·12 claims
- 3175US7064045B2Laser based method and device for forming spacer structures for packaging optical reflection devicesMIRADIA INC·Filed 2004·Granted Jun 20, 2006·16 cites·28 claims
- 3274US7863697B2Method and apparatus for MEMS oscillatorMIRADIA INC·Filed 2007·Granted Jan 4, 2011·6 cites·17 claims
- 3374US7349140B2Triple alignment substrate method and structure for packaging devicesMIRADIA INC·Filed 2005·Granted Mar 25, 2008·6 cites·7 claims
- 3474US7190508B2Method and structure of patterning landing pad structures for spatial light modulatorsMIRADIA INC·Filed 2005·Granted Mar 13, 2007·7 cites·15 claims
- 3573US7833879B2Low temperature hermetic bonding at water level and method of bonding for micro display applicationMIRADIA INC·Filed 2009·Granted Nov 16, 2010·5 cites·17 claims
- 3673US7303645B2Method and system for hermetically sealing packages for opticsMIRADIA INC·Filed 2003·Granted Dec 4, 2007·12 cites·30 claims
- 3772US8022520B2System for hermetically sealing packages for opticsMIRADIA INC·Filed 2006·Granted Sep 20, 2011·3 cites·29 claims
- 3871US9278853B2Manufacturing process of MEMS deviceMIRADIA INC·Filed 2014·Granted Mar 8, 2016·2 cites·16 claims
- 3970US7141870B2Apparatus for micro-electro mechanical system packageMIRADIA INC·Filed 2004·Granted Nov 28, 2006·16 cites·4 claims
- 4070US7109120B2Profiled standoff structure and method for optical display packageMIRADIA INC·Filed 2005·Granted Sep 19, 2006·4 cites·10 claims
- 4169US7585747B1Low temperature hermetic bonding at water level and method of bonding for micro display applicationMIRADIA INC·Filed 2005·Granted Sep 8, 2009·4 cites·22 claims
- 4268US7202989B2Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrateMIRADIA INC·Filed 2005·Granted Apr 10, 2007·4 cites·11 claims
- 4367US7369297B2Mirror structure with single crystal silicon cross-memberMIRADIA INC·Filed 2005·Granted May 6, 2008·4 cites·33 claims
- 4466US7884839B2Method and system for image processing for spatial light modulatorsMIRADIA INC·Filed 2005·Granted Feb 8, 2011·1 cites·6 claims
- 4566US7502158B2Method and structure for high fill factor spatial light modulator with integrated spacer layerMIRADIA INC·Filed 2005·Granted Mar 10, 2009·4 cites·13 claims
- 4666US7374962B2Method of fabricating reflective spatial light modulator having high contrast ratioMIRADIA INC·Filed 2005·Granted May 20, 2008·3 cites·20 claims
- 4766US7285478B2Method for micro-electromechanical system packageMIRADIA INC·Filed 2006·Granted Oct 23, 2007·3 cites·8 claims
- 4865US7825519B2Method and device for wafer scale packaging of optical devices using a scribe and break processMIRADIA INC·Filed 2008·Granted Nov 2, 2010·2 cites·7 claims
- 4965US7453624B2Projection display system including a high fill ratio silicon spatial light modulatorMIRADIA INC·Filed 2006·Granted Nov 18, 2008·3 cites·7 claims
- 5065US7026695B2Method and apparatus to reduce parasitic forces in electro-mechanical systemsMIRADIA INC·Filed 2003·Granted Apr 11, 2006·18 cites·44 claims
Showing the top 50 of 84 patent records by PatentIndex Score.
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