Tool for cleaning particles from wafer stage

Abstract

The present invention discloses a tool for cleaning particles from a wafer stage, comprising: a main body, a driving device, a power supply, and a cleaning module composed of a rotary base, a turntable, and an elastic member, wherein the main body is designed to be extendable, having a accommodating space disposed at the front thereof, and the driving device is arranged in the accommodating space for driving the cleaning module, and the power supply is coupled to the driving device for providing power to the same. Moreover, the rotary base is connected to the turntable by way of the elastic member, so that the driving device can drive the turntable to rotate for cleaning the wafer stage. A plurality turntables of different characteristic can be selected to be used in the cleaning module of the invention with respect to different cleaning requirement and environment.

1 . A tool for cleaning particles from a wafer stage, comprising: 
 a main body, comprising a handle section and a cleaning module section disposed with respect to the handle section;    a driving device, disposed inside the main body;    a power supply, disposed inside the main body and coupled to the driving device; and    a cleaning module, disposed inside the main body and coupled to the driving device.    
   
   
       2 . The tool as recited in  claim 1 , further comprising an accommodating space arranged inside the cleaning module section for receiving the driving device.  
   
   
       3 . The tool as recited in  claim 1 , wherein the length of the main body is extendable.  
   
   
       4 . The tool as recited in  claim 1 , further comprising a switch coupled to the power supply.  
   
   
       5 . The tool as recited in  claim 4 , wherein the switch is arranged at the handle section.  
   
   
       6 . The tool as recited in  claim 1 , wherein the driving device is substantially a motor.  
   
   
       7 . The tool as recited in  claim 1 , wherein the power supply is substantially a battery set.  
   
   
       8 . The tool as recited in  claim 1 , wherein the cleaning module further comprises: 
 a rotary base;    a turntable, coupled to the rotary base; and    an elastic member, disposed between the rotary base and the turntable.    
   
   
       9 . The tool as recited in  claim 1 , further comprising an illuminating device connected to the cleaning module section.  
   
   
       10 . The tool as recited in  claim 9 , further comprising a switch arranged at the handle section for controlling the illuminating device.  
   
   
       11 . The tool as recited in  claim 10 , wherein the cleaning module performs a cleaning procedure by an electrostatic suction manner.  
   
   
       12 . The tool as recited in  claim 1 , wherein the cleaning module performs a cleaning procedure by a vacuum suction manner.