Assignee
PSC POWERCHIP SEMICONDUCTOR CO
0 granted patents·3 pending applications·0 citations·filing 2004–2004
Top patents by PatentIndex Score
3 records- 0144US2006048333A1Tool for cleaning particles from wafer stagePSC POWERCHIP SEMICONDUCTOR CO·Filed 2004·Application pending·0 cites
- 0236US2006032517A1Apparatus and method for monitoring a process of wet cleaningPSC POWERCHIP SEMICONDUCTOR CO·Filed 2004·Application pending·0 cites
- 0311US2005205417A1Method for cleaning the surface of an electrostatic chuckPSC POWERCHIP SEMICONDUCTOR CO·Filed 2004·Application pending·0 cites
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