Load lock chamber with gas-sealing bellows

Abstract

A load-lock chamber having a gas-sealing bellows to prevent the flow of gases into the chamber through a shaft opening is disclosed. The load-lock chamber includes a chamber wall that defines a chamber interior. A bellows housing is defined by the chamber wall, and a shaft opening provided in the bellows housing. A flexible bellows is provided in the bellows housing and seals the shaft opening from the chamber interior. A lift shaft having a cassette stage extends through the shaft opening and the bellows and into the chamber interior. A shaft rotation device may engage the lift shaft to rotate the lift shaft and cassette stage in the chamber interior.

1 . A load-lock chamber comprising: 
 a chamber wall defining a chamber interior;    a bellows housing defined by said chamber wall;    a shaft opening provided in said bellows housing;    a flexible bellows provided in said bellows housing and sealing said shaft opening from said chamber interior; and    a lift shaft having a cassette stage extending through said shaft opening and said bellows into said chamber interior.    
   
   
       2 . The load-lock chamber of  claim 1  further comprising a shaft rotation device operably engaging said lift shaft for rotating said lift shaft and said cassette stage in said chamber interior.  
   
   
       3 . The load-lock chamber of  claim 1  wherein said bellows comprises a metal alloy.  
   
   
       4 . The load-lock chamber of  claim 3  further comprising a shaft rotation device operably engaging said lift shaft for rotating said lift shaft and said cassette stage in said chamber interior.  
   
   
       5 . The load-lock chamber of  claim 2  wherein said shaft rotation device comprises a housing and a housing magnet provided in said housing for magnetically rotating said lift shaft.  
   
   
       6 . The load-lock chamber of  claim 5  wherein said bellows comprises a metal alloy.  
   
   
       7 . The load-lock chamber of  claim 3  wherein said metal alloy comprises stainless steel.  
   
   
       8 . The load-lock chamber of  claim 7  further comprising a shaft rotation device operably engaging said lift shaft for rotating said lift shaft and said cassette stage in said chamber interior.  
   
   
       9 . The load-lock chamber of  claim 8  wherein said shaft rotation device comprises a housing and a housing magnet provided in said housing for magnetically rotating said lift shaft.  
   
   
       10 . A load-lock chamber comprising: 
 a chamber wall defining a chamber interior;    a bellows housing defined by said chamber wall;    a shaft opening provided in said bellows housing;    a lift shaft having a cassette stage extending through said shaft opening and said bellows housing and into said chamber interior;    a bellows mount frame carried by said lift shaft; and    a flexible bellows carried by said bellows mount frame in said bellows housing and sealing said shaft opening from said chamber interior.    
   
   
       11 . The load-lock chamber of  claim 10  further comprising a shaft rotation device operably engaging said lift shaft for rotating said lift shaft and said cassette stage in said chamber interior.  
   
   
       12 . The load-lock chamber of  claim 10  wherein said bellows comprises a metal alloy.  
   
   
       13 . The load-lock chamber of  claim 12  further comprising a shaft rotation device operably engaging said lift shaft for rotating said lift shaft and said cassette stage in said chamber interior.  
   
   
       14 . The load-lock chamber of  claim 11  wherein said shaft rotation device comprises a housing and a housing magnet provided in said housing for magnetically rotating said lift shaft.  
   
   
       15 . The load-lock chamber of  claim 14  wherein said bellows comprises a metal alloy.  
   
   
       16 . The load-lock chamber of  claim 15  wherein said metal alloy comprises stainless steel.  
   
   
       17 . A load-lock chamber comprising: 
 a chamber wall defining a chamber interior;    a bellows housing defined by said chamber wall;    a shaft opening provided in said bellows housing;    a flexible bellows provided in said bellows housing and sealing said shaft opening from said chamber interior;    a lift shaft having a cassette stage extending through said shaft opening and said bellows into said chamber interior; and    a shaft rotation device comprising an annular housing magnet surrounding said lift shaft for rotating said lift shaft and said cassette stage in said chamber interior.    
   
   
       18 . The load-lock chamber of  claim 17  wherein said bellows comprises a metal alloy.  
   
   
       19 . The load-lock chamber of  claim 18  wherein said metal alloy comprises stainless steel.  
   
   
       20 . The load-lock chamber of  claim 17  further comprising a bellows mount frame carried by said lift shaft and wherein said bellows is carried by said bellows mount frame.