Conditioning disk actuating system

Abstract

A conditioning disk actuating system for raising and lowering a conditioning disk inside a conditioning head for the conditioning of semiconductor wafer polishing pads. The system includes a fluid-actuated cylinder which is coupled to a travel hub vertically slidably mounted in a travel housing provided inside the conditioning head. The conditioning disk is mounted on the bottom end of a disk shaft carried by the travel hub. The fluid-actuated cylinder is operated to selectively lower and raise the travel hub and conditioning disk to press the disk against the polishing pad and remove the disk from the polishing pad, respectively. A position sensing mechanism may be provided in the conditioning head for revealing the “up” or “down” position of the conditioning disk.

What is claimed is:  
     
         1 . A system comprising: 
 a conditioning head;    a travel hub vertically movably mounted in said conditioning head;    a disk shaft carried by said travel hub;    a conditioning disk carried by said disk shaft;    a fluid-actuated cylinder operably engaging said travel hub for selectively moving said travel hub between upper and lower positions in said conditioning head; and    a fluid source connected to said fluid-actuated cylinder for flowing a fluid to and from said fluid-actuated cylinder.    
     
     
         2 . The system of  claim 1  further comprising a position sensing mechanism operably engaging said travel hub for sensing a position of said travel hub in said conditioning head.  
     
     
         3 . The system of  claim 1  wherein said fluid-actuated cylinder comprises a pneumatic cylinder.  
     
     
         4 . The system of  claim 3  further comprising a position sensing mechanism operably engaging said travel hub for sensing a position of said travel hub in said conditioning head.  
     
     
         5 . The system of  claim 1  further comprising a travel housing provided in said conditioning head and wherein said travel hub is vertically movably mounted in said travel housing.  
     
     
         6 . The system of  claim 5  further comprising a position sensing mechanism operably engaging said travel hub for sensing a position of said travel hub in said conditioning head.  
     
     
         7 . The system of  claim 5  wherein said fluid-actuated cylinder comprises a pneumatic cylinder.  
     
     
         8 . The system of  claim 7  further comprising a position sensing mechanism operably engaging said travel hub for sensing a position of said travel hub in said conditioning head.  
     
     
         9 . The system of  claim 2  wherein said position sensing mechanism comprises a magnetic ring carried by said travel hub, a position sensor provided in said conditioning head in adjacent contact with said magnetic ring, and a positioning monitor operably connected to said position sensor.  
     
     
         10 . The system of  claim 9  wherein said fluid-actuated cylinder comprises a pneumatic cylinder.  
     
     
         11 . The system of  claim 9  further comprising a travel housing provided in said conditioning head and wherein said travel hub is vertically movably mounted in said travel housing and said position sensor is provided on said travel housing.  
     
     
         12 . The system of  claim 3  further comprising a needle valve interposed between said fluid source and said fluid actuated cylinder for controlling a speed of movement of said fluid actuated cylinder from said lower position to said upper position.  
     
     
         13 . A system comprising: 
 a conditioning head;    a travel hub vertically movably mounted in said conditioning head;    a disk shaft carried by said travel hub;    a conditioning disk carried by said disk shaft;    a link carried by said travel hub;    a fluid-actuated cylinder engaging said link for selectively moving said travel hub between upper and lower positions in said conditioning head; and    a fluid source connected to said fluid-actuated cylinder for flowing a fluid to and from said fluid-actuated cylinder.    
     
     
         14 . The system of  claim 12  further comprising a position sensing mechanism operably engaging said travel hub for sensing a position of said travel hub in said conditioning head.  
     
     
         15 . The system of  claim 12  further comprising a travel housing provided in said conditioning head and wherein said travel hub is vertically movably mounted in said travel housing.  
     
     
         16 . The system of  claim 14  wherein said position sensing mechanism comprises a magnetic ring carried by said travel hub, a position sensor provided in said conditioning head in adjacent contact with said magnetic ring, and a positioning monitor operably connected to said position sensor.  
     
     
         17 . A system comprising: 
 a conditioning head;    a travel hub vertically movably mounted in said conditioning head;    a disk shaft carried by said travel hub;    a conditioning disk carried by said disk shaft;    a link having a vertical segment carried by said travel hub and a horizontal segment extending from said vertical segment;    a fluid-actuated cylinder engaging said horizontal segment of said link for selectively moving said travel hub between upper and lower positions in said conditioning head; and    a fluid source connected to said fluid-actuated cylinder for flowing a fluid to and from said fluid-actuated cylinder.    
     
     
         18 . The system of  claim 17  wherein said fluid-actuated cylinder comprises a pneumatic cylinder.  
     
     
         19 . The system of  claim 17  further comprising a position sensing mechanism operably engaging said travel hub for sensing a position of said travel hub in said conditioning head.  
     
     
         20 . The system of  claim 19  wherein said position sensing mechanism comprises a magnetic ring carried by said travel hub, a position sensor provided in said conditioning head in adjacent contact with said magnetic ring, and a positioning monitor operably connected to said position sensor.  
     
     
         21 . A system for conditioning a CMP pad, comprising: 
 a housing;    a piston vertically slidably carried by said housing;    a piston actuating mechanism operably engaging said piston for moving said piston vertically in said housing;    a travel housing engaging said piston for vertical movement with said piston;    a conditioning disk carried by said travel housing; and    a drive mechanism operably engaging said travel housing for rotating said conditioning disk against the CMP pad.    
     
     
         22 . The system of  claim 21  further comprising a magnetic ring carried by said piston and a proximity switch carried by said housing in magnetic contact with said magnetic ring for monitoring a position of said piston in said housing.  
     
     
         23 . The system of  claim 21  wherein said piston actuating mechanism comprises an upper air cavity provided in said housing above said piston for receiving pressurized air and driving said piston downwardly in said housing and a lower air cavity provided in said housing below said piston for receiving pressurized air and driving said piston upwardly in said housing.  
     
     
         24 . The system of  claim 21  wherein said drive mechanism comprises a belt gear operably engaging said travel housing for rotating said travel housing and a drive belt engaging said belt gear for rotating said belt gear.  
     
     
         25 . The system of  claim 21  further comprising a hub provided in said housing and operably engaged by said drive mechanism and engaging said travel housing for rotating said travel housing responsive to operation of said drive mechanism.  
     
     
         26 . The system of  claim 21  further comprising a travel housing bearing disposed between said piston and said travel housing.  
     
     
         27 . The system of  claim 21  further comprising a timer control mechanism operably connected to said piston actuating mechanism for timing vertical movement of said piston in said housing.