Anti-ESD movable rack system for storing reticles

Abstract

A reticle storing movable rack system comprises a plurality of flat tracks fixedly secured to a floor. There is provided a plurality of rows of storage units. Each row has a plurality of independent racks interconnected with each other, which racks are adapted to be moved as a single row along the flat tracks. A user engageable drive assist mechanism is provided to move the rows. Each of the racks comprises shelves with plurality of cells for housing reticles. The racks are electrically grounded, and the cells are made metallic and electrically connected to the racks to secure electrostatic shielding properties. With the purpose of imparting antiseismic properties to the system, the shelves are made with a slope inside the racks, the slope being preferably about 8°.

What is claimed is:  
     
         1 . A reticle storing movable rack system comprising: 
 a plurality of flat tracks fixedly secured to a floor,    a plurality of rows of storage units, each of said storage units comprising of a plurality of independent racks interconnected with each other and adapted to be moved as a single row along flat tracks of said plurality of flat tracks, each of said racks being electrically grounded, and    an operator engageable drive assist mechanism to move rows of said plurality of rows,    wherein each of said racks comprises shelves with plurality of cells for housing reticles therein, said cells having electrostatic shielding properties.    
     
     
         2 . The system according to  claim 1 , wherein said electrostatic shielding properties are secured by making said cells metallic and electrically connecting them to said racks.  
     
     
         3 . The system according to  claim 1 , wherein, with the purpose of imparting antiseismic properties to the system, said shelves are made with a slope directed inside said racks.  
     
     
         4 . The system according to  claim 3 , wherein said slope is about 8°.  
     
     
         5 . The system according to  claim 3 , wherein rows of said plurality of rows are made double-sided.  
     
     
         6 . A reticle storing movable rack system comprising: 
 a plurality of flat tracks fixedly secured to a floor,    a plurality of rows of storage units, each of said storage units comprising of a plurality of independent racks interconnected with each other and adapted to be moved as a single row along flat tracks of said plurality of flat tracks, and    an operator engageable drive assist mechanism to move rows of said plurality of rows,    wherein each of said racks comprises shelves with plurality of cells for housing reticles therein and    wherein, with the purpose of imparting antiseismic properties to the system, said shelves are made with a slope directed inside said racks.    
     
     
         7 . The system according to  claim 6 , wherein said slope is about 8°.  
     
     
         8 . The system according to  claim 6 , wherein rows of said plurality of rows are made double-sided.  
     
     
         9 . The system according to  claim 6 , wherein each of said racks is electrically grounded and said cells have electrostatic shielding properties.  
     
     
         10 . The system according to  claim 9 , wherein said electrostatic shielding properties are secured by making said cells metallic and electrically connecting them to said racks.  
     
     
         11 . A reticle storing movable rack system comprising: 
 a plurality of flat tracks fixedly secured to a floor,    a plurality of rows of storage units, each of said storage units comprising of a plurality of independent racks interconnected with each other and adapted to be moved as a single row along flat tracks of said plurality of flat tracks, and    an operator engageable drive assist mechanism to move rows of said plurality of rows,    wherein each of said racks comprises shelves with plurality of cells for housing reticles therein, said shelves being made with a slope directed inside said racks and said cells having electrostatic shielding properties.    
     
     
         12 . The system according to  claim 11 , wherein said electrostatic shielding properties are secured by making said cells metallic, electrically connecting said metallic cells to said racks, and electrically grounding said racks.  
     
     
         13 . The system according to  claim 11 , wherein said slope is about 8°.  
     
     
         14 . The system according to  claim 11 , wherein rows of said plurality of rows are made double-sided.