Topic leaderboard
Manufacture of microstructural devices
Ranked by the PatentIndex Score — a 1–99 percentile within B81C · public-visibility date · generated 2026
top 25 per window · public-visibility date
Rising· last 2 yrs
Inventors whose newest B81C patents became public in the last 2 years — the current frontier
- 199Pavan Gupta21 patents · 142 citations
- 296Charles I. Grosjean23 patents · 214 citations
- 392Colin Robert Jenkins19 patents · 101 citations
- 488Renata Melamud Berger8 patents · 84 citations
- 583Aaron A. Geisberger19 patents · 172 citations
- 679Stefan Barzen27 patents · 128 citations
- 775Robert S. Okojie7 patents · 152 citations
- 871Wen-Chuan Tai40 patents · 133 citations
- 967Shrawan Singhal8 patents · 137 citations
- 1063Ginel C. Hill17 patents · 60 citations
- 1158Ryan Diestelhorst8 patents · 88 citations
- 1254Marc Fueldner18 patents · 62 citations
- 1350Steffen Bieselt25 patents · 50 citations
- 1446Andrei M. Shkel7 patents · 45 citations
- 1542Jia Jie Xia12 patents · 58 citations
- 1638Dan Benjamin6 patents · 35 citations
- 1733You Qian19 patents · 31 citations
- 1829Ulrich Krumbein12 patents · 30 citations
- 1925Hsi-Cheng Hsu17 patents · 32 citations
- 2021Jui-Chun Weng16 patents · 32 citations
- 2117António José Marques Trindade10 patents · 27 citations
- 2213Federico Vercesi13 patents · 24 citations
- 238Ovadia Abed5 patents · 73 citations
- 244Yi-Hsien Chang23 patents · 29 citations
- 251Jens Frey24 patents · 31 citations
Active· last 5 yrs
Sustained B81C output across the last 5 years
- 199Dahl-Young Khang21 patents · 5,316 citations
- 296Yugang Sun20 patents · 4,484 citations
- 392Zhengtao Zhu13 patents · 3,178 citations
- 488Heung Cho Ko15 patents · 2,597 citations
- 583Jongseung Yoon12 patents · 1,641 citations
- 679Michael Motala10 patents · 1,287 citations
- 775Mark L. Adams10 patents · 959 citations
- 871Mark Stoykovich15 patents · 1,194 citations
- 967Chang-Jae Yu9 patents · 1,063 citations
- 1063Nevada J. Sanchez37 patents · 999 citations
- 1158Jeffrey C. Maling30 patents · 252 citations
- 1254Susan A. Alie23 patents · 603 citations
- 1350Minekazu Sakai16 patents · 602 citations
- 1446Khalil Najafi17 patents · 623 citations
- 1542Han Cao15 patents · 322 citations
- 1638Pavan Gupta21 patents · 142 citations
- 1733Jengping Lu14 patents · 286 citations
- 1829Robert Mark Boysel8 patents · 713 citations
- 1925Charles I. Grosjean23 patents · 214 citations
- 2021Kuei-Sung Chang70 patents · 240 citations
- 2117Randall L. Kubena14 patents · 255 citations
- 2213Alfons Dehe75 patents · 493 citations
- 238Flavio Francesco Villa22 patents · 192 citations
- 244Gaius Gillman Fountain, Jr.5 patents · 380 citations
- 251Colin Robert Jenkins19 patents · 101 citations
All-time canon
Career PatentIndex Score in B81C
- 199Nathan W. Cheung37 patents · 5,403 citations
- 296Dahl-Young Khang21 patents · 5,316 citations
- 392Yugang Sun20 patents · 4,484 citations
- 488Zhengtao Zhu13 patents · 3,178 citations
- 583Todd A. Thorsen23 patents · 3,163 citations
- 679Grover Owens11 patents · 4,114 citations
- 775Vadim Vladimirovich Yuzhakov9 patents · 3,866 citations
- 871Heung Cho Ko15 patents · 2,597 citations
- 967Jongseung Yoon12 patents · 1,641 citations
- 1063Z. Lisa Zhang8 patents · 1,230 citations
- 1158Michael Motala10 patents · 1,287 citations
- 1254Mark L. Adams10 patents · 959 citations
- 1350Rebecca J. Jackman6 patents · 1,437 citations
- 1446Qin-Yi Tong9 patents · 894 citations
- 1542Huinan Yu5 patents · 941 citations
- 1638Jeremy Burdon5 patents · 941 citations
- 1733Piotr Grodzinski5 patents · 941 citations
- 1829Rong-Fong Huang5 patents · 941 citations
- 1925Shawn Jay Cunningham9 patents · 543 citations
- 2021Mario Johannes Meissl8 patents · 1,132 citations
- 2117Vijendra Sahi6 patents · 905 citations
- 2213Shinji Yoshihara10 patents · 1,360 citations
- 238Satyadev Patel30 patents · 1,249 citations
- 244Mark Stoykovich15 patents · 1,194 citations
- 251Theresa A. Core9 patents · 1,102 citations
Rising· last 2 yrs
The top-scoring B81C patents made public in the last 2 years
- 199US12326604B2✦ AIIntegrated circuit packages having electrical and optical connectivity and methods of maki2 cites · 202467% earned
- 296US12391546B1✦ AIMethod of making acoustic devices with directional reinforcement4 cites · 202575% earned
- 392US12482686B2✦ AIOffset alignment and repair in micro device transfer2 cites · 202458% earned
- 488US12410053B1Embedded digital sensor structure1 cites · 202556% earned
- 583US11926524B1Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electr2 cites · 202467% earned
- 679US12163229B2Multi zone spot heating in EPI1 cites · 202446% earned
- 775US12122667B2Sensor devices with gas-permeable cover and associated production methods1 cites · 202456% earned
- 871US11965797B1Bipolar transistor type MEMS pressure sensor and preparation method thereof1 cites · 202467% earned
- 967US11993011B1Plasma micronozzle adapter1 cites · 202467% earned
- 1063US12569880B2CMOS ultrasonic transducers and related apparatus and methods0 cites · 20240% earned
- 1158US12365582B2MEMS resonator integrated cicruit fabrication0 cites · 20250% earned
- 1254US12374547B1Methods of forming nanostructures utilizing self-assembled nucleic acids0 cites · 20250% earned
- 1350US12445107B2Non-lid-bonded MEMS resonator with phosphorus dopant0 cites · 20240% earned
- 1446US12308275B2Heterogeneous integration of components onto compact devices using moiré based metrology a0 cites · 20240% earned
- 1542USRE49987EMultiple plated via arrays of different wire heights on a same substrate0 cites · 20240% earned
- 1638US12492120B2MEMS resonator0 cites · 20250% earned
- 1733US12508587B2Multilayer fluidic devices and methods for their fabrication0 cites · 20240% earned
- 1829US12285780B2Capacitive micromachined ultrasonic transducer with contoured electrode0 cites · 20240% earned
- 1925US12443281B2Wearable glove with a plurality of fluidic actuators and a plurality of fluidic control de0 cites · 20240% earned
- 2021US12351452B1MEMS with small-molecule barricade0 cites · 20250% earned
- 2117US12504839B2Electronic device0 cites · 20240% earned
- 2213US12263506B2Anti-stiction bottom cavity surface for micromachined ultrasonic transducer devices0 cites · 20240% earned
- 238US12189114B2Optical device production method0 cites · 20240% earned
- 244US12534358B2Semiconductor device structure with movable membrane0 cites · 20240% earned
- 251US12280370B2Covalently modified surfaces, kits, and methods of preparation and use0 cites · 20240% earned
Active· last 5 yrs
The top-scoring B81C patents of the last 5 years
- 199US11385108B2✦ AISealed force sensor with etch stop layer20 cites · 202181% earned
- 296US10999684B1✦ AIMEMS microphone and method of manufacturing the MEMS microphone15 cites · 202189% earned
- 392US11366430B2✦ AIVapor cells having one or more optical windows bonded to a dielectric body11 cites · 202182% earned
- 488US10944041B1Hybrid ultrasonic transducer and method of forming the same12 cites · 202182% earned
- 583US11054453B2Photonic-crystal vapor cells for imaging of electromagnetic fields10 cites · 202181% earned
- 679US11163230B2Imprint lithography stamp method of making and using the same13 cites · 202183% earned
- 775US12048558B2System for determining fluid level in a biological subject10 cites · 202181% earned
- 871US11087989B1Cryogenic atomic layer etch with noble gases8 cites · 202176% earned
- 967US12070307B2Electrically functional polymer microneedle array8 cites · 202180% earned
- 1063US11066296B1Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electr9 cites · 202181% earned
- 1158US11553280B2Piezoelectric MEMS diaphragm microphone7 cites · 202175% earned
- 1254US11670615B2Bonded structures6 cites · 202167% earned
- 1350US11818540B1Acoustic devices with edge corrugation4 cites · 202370% earned
- 1446US12391546B1Method of making acoustic devices with directional reinforcement4 cites · 202575% earned
- 1542US11335607B2Apparatus and methods for wafer to wafer bonding6 cites · 202285% earned
- 1638US11703356B1Online trimming device and method for micro-shell resonator gyroscope3 cites · 202380% earned
- 1733US12032216B2Integrated circuit packages having electrical and optical connectivity and methods of maki6 cites · 202178% earned
- 1829US11361971B2High aspect ratio Bosch deep etch5 cites · 202272% earned
- 1925US11564312B2Laser light source co-packaged with photonic integrated circuit and substrate5 cites · 202284% earned
- 2021US11370656B2Stacked-die MEMS resonator4 cites · 202154% earned
- 2117US11260424B2Contoured electrode for capacitive micromachined ultrasonic transducer4 cites · 202164% earned
- 2213US11312617B2Mems device built using the BEOL metal layers of a solid state semiconductor process4 cites · 202167% earned
- 238US12006205B2Micro-device structures with etch holes4 cites · 202270% earned
- 244US11618673B2Transfer system for microelements4 cites · 202275% earned
- 251US11703331B2Three dimensional microstructures with selectively removed regions for use in gyroscopes a4 cites · 202275% earned
All-time canon
The defining B81C patents of the whole record
- 199US5512131A✦ AIFormation of microstamped patterns on surfaces and derivative articles1,825 cites · 199696% earned
- 296US6334856B1✦ AIMicroneedle devices and methods of manufacture and use thereof1,581 cites · 200290% earned
- 392US5501893A✦ AIMethod of anisotropically etching silicon1,052 cites · 199695% earned
- 488US7622367B1Methods and devices for fabricating and assembling printable semiconductor elements977 cites · 200985% earned
- 583US5376252AMicrofluidic structure and process for its manufacture948 cites · 199495% earned
- 679US6503231B1Microneedle device for transport of molecules across tissue921 cites · 200389% earned
- 775US6408878B2Microfabricated elastomeric valve and pump systems910 cites · 200184% earned
- 871US6256533B1Apparatus and method for using an intracutaneous microneedle array893 cites · 200191% earned
- 967US5311360AMethod and apparatus for modulating a light beam872 cites · 199491% earned
- 1063US7557367B2Stretchable semiconductor elements and stretchable electrical circuits832 cites · 200684% earned
- 1158US6355198B1Method of forming articles including waveguides via capillary micromolding and microtransf831 cites · 200287% earned
- 1254US6794119B2Method for fabricating a structure for a microelectromechanical systems (MEMS) device746 cites · 200391% earned
- 1350US6379324B1Intracutaneous microneedle array apparatus731 cites · 200292% earned
- 1446US6589625B1Hermetic seal and method to create the same727 cites · 200392% earned
- 1542US5589136ASilicon-based sleeve devices for chemical reactions714 cites · 199695% earned
- 1638US5808797AMethod and apparatus for modulating a light beam663 cites · 199892% earned
- 1733US6167910B1Multi-layer microfluidic devices629 cites · 200189% earned
- 1829US7972875B2Optical systems fabricated by printing-based assembly596 cites · 201085% earned
- 1925US6027630AMethod for electrochemical fabrication581 cites · 200082% earned
- 2021US6342427B1Method for forming micro cavity566 cites · 200295% earned
- 2117US7521292B2Stretchable form of single crystal silicon for high performance electronics on rubber subs561 cites · 200686% earned
- 2213US6312612B1Apparatus and method for manufacturing an intracutaneous microneedle array554 cites · 200190% earned
- 238US6074725AFabrication of microfluidic circuits by printing techniques534 cites · 200092% earned
- 244US7115305B2Method of producing regular arrays of nano-scale objects using nano-structured block-copol529 cites · 200392% earned
- 251US7195733B2Composite patterning devices for soft lithography514 cites · 200595% earned
Rising· last 2 yrs
Assignees whose newest B81C patents became public in the last 2 years — the current frontier
- 199TEXAS INSTRUMENTS INC220 patents · 5,196 citations
- 296UNIV LELAND STANFORD JUNIOR24 patents · 2,549 citations
- 392UNIV CALIFORNIA82 patents · 4,941 citations
- 488BOSCH GMBH ROBERT399 patents · 4,333 citations
- 583KNOWLES ELECTRONICS LLC70 patents · 1,019 citations
- 679INVENSENSE INC161 patents · 1,276 citations
- 775CANON KK81 patents · 1,485 citations
- 871COMMISSARIAT ENERGIE ATOMIQUE151 patents · 1,192 citations
- 967CORNING INC24 patents · 610 citations
- 1063XEROX CORP33 patents · 793 citations
- 1158APPLIED MATERIALS INC46 patents · 659 citations
- 1254MICRON TECHNOLOGY INC60 patents · 542 citations
- 1350TAIWAN SEMICONDUCTOR MFG CO LTD441 patents · 1,133 citations
- 1446ST MICROELECTRONICS SRL211 patents · 996 citations
- 1542PALO ALTO RES CT INC39 patents · 411 citations
- 1638UNIV TEXAS27 patents · 319 citations
- 1733MURATA MANUFACTURING CO58 patents · 337 citations
- 1829SITIME CORP41 patents · 169 citations
- 1925INFINEON TECHNOLOGIES AG280 patents · 1,176 citations
- 2021X CELEPRINT LTD18 patents · 319 citations
- 2117ADVANCED SEMICONDUCTOR ENG50 patents · 298 citations
- 2213UNIV DUKE10 patents · 329 citations
- 238NEXTINPUT INC10 patents · 146 citations
- 244ST MICROELECTRONICS INC27 patents · 126 citations
- 251SCHOTT AG18 patents · 126 citations
Active· last 5 yrs
Sustained B81C output across the last 5 years
- 199UNIV ILLINOIS44 patents · 6,469 citations
- 296HARVARD COLLEGE36 patents · 5,234 citations
- 392TEXAS INSTRUMENTS INC220 patents · 5,196 citations
- 488UNIV LELAND STANFORD JUNIOR24 patents · 2,549 citations
- 583UNIV CALIFORNIA82 patents · 4,941 citations
- 679BOSCH GMBH ROBERT399 patents · 4,333 citations
- 775KNOWLES ELECTRONICS LLC70 patents · 1,019 citations
- 871ANALOG DEVICES INC116 patents · 4,223 citations
- 967MASSACHUSETTS INST TECHNOLOGY29 patents · 1,242 citations
- 1063INVENSENSE INC161 patents · 1,276 citations
- 1158CANON KK81 patents · 1,485 citations
- 1254WISCONSIN ALUMNI RES FOUND24 patents · 907 citations
- 1350IBM270 patents · 2,613 citations
- 1446DENSO CORP75 patents · 1,765 citations
- 1542COMMISSARIAT ENERGIE ATOMIQUE151 patents · 1,192 citations
- 1638INTEL CORP77 patents · 1,126 citations
- 1733UNIV FLORIDA10 patents · 552 citations
- 1829CORNING INC24 patents · 610 citations
- 1925HEWLETT PACKARD DEVELOPMENT CO93 patents · 1,343 citations
- 2021SAMSUNG ELECTRONICS CO LTD84 patents · 1,245 citations
- 2117XEROX CORP33 patents · 793 citations
- 2213HRL LAB LLC28 patents · 674 citations
- 238KIONIX INC17 patents · 476 citations
- 244UNIV CARNEGIE MELLON16 patents · 503 citations
- 251APPLIED MATERIALS INC46 patents · 659 citations
All-time canon
All-time PatentIndex Score in B81C
- 199UNIV ILLINOIS44 patents · 6,469 citations
- 296SILICON GENESIS CORP39 patents · 5,477 citations
- 392CALIFORNIA INST OF TECHN56 patents · 4,446 citations
- 488HARVARD COLLEGE36 patents · 5,234 citations
- 583PROCTER & GAMBLE9 patents · 3,838 citations
- 679CALIPER TECHN CORP7 patents · 2,084 citations
- 775TEXAS INSTRUMENTS INC220 patents · 5,196 citations
- 871UNIV LELAND STANFORD JUNIOR24 patents · 2,549 citations
- 967GEORGIA TECH RES INST24 patents · 3,363 citations
- 1063UNIV CALIFORNIA82 patents · 4,941 citations
- 1158SANDIA CORP43 patents · 4,302 citations
- 1254UNIV SOUTHERN CALIFORNIA12 patents · 990 citations
- 1350MOLECULAR IMPRINTS INC17 patents · 1,772 citations
- 1446CORNELL RES FOUNDATION INC25 patents · 2,654 citations
- 1542BOSCH GMBH ROBERT399 patents · 4,333 citations
- 1638KNOWLES ELECTRONICS LLC70 patents · 1,019 citations
- 1733NANOSYS INC9 patents · 1,087 citations
- 1829MOTOROLA INC19 patents · 1,520 citations
- 1925ANALOG DEVICES INC116 patents · 4,223 citations
- 2021AGILENT TECHNOLOGIES INC19 patents · 1,435 citations
- 2117REFLECTIVITY INC19 patents · 1,067 citations
- 2213MASSACHUSETTS INST TECHNOLOGY29 patents · 1,242 citations
- 238INVENSAS BONDING TECH INC14 patents · 764 citations
- 244INVENSENSE INC161 patents · 1,276 citations
- 251CANON KK81 patents · 1,485 citations
90–99 field-defining50–89 strong<50 emergingearned by citationsfrom family breadth