Assignee
KIONIX INC
US·43 granted patents·6 pending applications·1,250 citations·filing 1996–2022
Top patents by PatentIndex Score
49 records- 0198US6394942B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted May 28, 2002·77 cites·11 claims
- 0298US6245227B1Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 1998·Granted Jun 12, 2001·124 cites·41 claims
- 0397US6454938B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Sep 24, 2002·95 cites·29 claims
- 0497US6149190AMicromechanical accelerometer for automotive applicationsKIONIX INC·Filed 1998·Granted Nov 21, 2000·178 cites·13 claims
- 0595US6417510B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Jul 9, 2002·46 cites·4 claims
- 0693US6239473B1Trench isolation for micromechanical devicesKIONIX INC·Filed 1999·Granted May 29, 2001·137 cites·14 claims
- 0792US6464866B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Oct 15, 2002·31 cites·6 claims
- 0892US6432311B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Aug 13, 2002·34 cites·1 claims
- 0990US6797589B2Insulating micro-structure and method of manufacturing sameKIONIX INC·Filed 2002·Granted Sep 28, 2004·46 cites·16 claims
- 1090US6342430B1Trench isolation for micromechanical devicesKIONIX INC·Filed 2000·Granted Jan 29, 2002·57 cites·16 claims
- 1189US10053360B1Pseudo SOI processKIONIX INC·Filed 2017·Granted Aug 21, 2018·4 cites·14 claims
- 1289US7430909B2Tri-axis accelerometerKIONIX INC·Filed 2006·Granted Oct 7, 2008·33 cites·41 claims
- 1389US6461516B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Oct 8, 2002·20 cites·4 claims
- 1488US7171975B2Fabrication of ultra-shallow channels for microfluidic devices and systemsKIONIX INC·Filed 2003·Granted Feb 6, 2007·42 cites·81 claims
- 1587US10167191B2Method for manufacturing a micro electro-mechanical systemKIONIX INC·Filed 2017·Granted Jan 1, 2019·5 cites·24 claims
- 1687US6792804B2Sensor for measuring out-of-plane accelerationKIONIX INC·Filed 2001·Granted Sep 21, 2004·44 cites·64 claims
- 1784US7036372B2Z-axis angular rate sensorKIONIX INC·Filed 2004·Granted May 2, 2006·92 cites·10 claims
- 1884US6066265AMicromachined silicon probe for scanning probe microscopyKIONIX INC·Filed 1996·Granted May 23, 2000·109 cites·21 claims
- 1978US10766767B2Eutectic bonding with ALGeKIONIX INC·Filed 2019·Granted Sep 8, 2020·2 cites·15 claims
- 2077US9541462B2Pressure sensor including deformable pressure vessel(s)KIONIX INC·Filed 2014·Granted Jan 10, 2017·3 cites·27 claims
- 2176US10793427B2Eutectic bonding with AlGeKIONIX INC·Filed 2017·Granted Oct 6, 2020·2 cites·7 claims
- 2276US6673253B2Method of fabricating integrated LC/ESI device using smile, latent masking, and delayed locos techniques.KIONIX INC·Filed 2001·Granted Jan 6, 2004·7 cites·9 claims
- 2375US6800202B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Oct 5, 2004·10 cites·3 claims
- 2474US7011793B2Reconfigurable modular microfluidic system and method of fabricationKIONIX INC·Filed 2004·Granted Mar 14, 2006·20 cites·31 claims
- 2574US6913701B2Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniquesKIONIX INC·Filed 2003·Granted Jul 5, 2005·6 cites·9 claims
- 2669US7451057B2System and method for detection of freefall with spin using two tri-axis accelerometersKIONIX INC·Filed 2007·Granted Nov 11, 2008·4 cites·17 claims
- 2766US10030976B2Phase-based measurement and control of a gyroscopeKIONIX INC·Filed 2015·Granted Jul 24, 2018·2 cites·40 claims
- 2865US6706200B2Method for fabricating ESI device using smile and delayed LOCOS techniquesKIONIX INC·Filed 2001·Granted Mar 16, 2004·8 cites·9 claims
- 2961US9465044B2Angular velocity estimation using a magnetometer and accelerometerKIONIX INC·Filed 2013·Granted Oct 11, 2016·1 cites·18 claims
- 3060US7026899B2Push/pull actuator for microstructuresKIONIX INC·Filed 2002·Granted Apr 11, 2006·9 cites·21 claims
- 3156US11527376B2Micro-electromechanical system devices and methodsKIONIX INC·Filed 2019·Granted Dec 13, 2022·0 cites·20 claims
- 3256US9347846B2Capacitance-based pressure sensor including pressure vessel(s)KIONIX INC·Filed 2014·Granted May 24, 2016·1 cites·28 claims
- 3354US10829366B2Electronic systems with through-substrate interconnects and MEMS deviceKIONIX INC·Filed 2018·Granted Nov 10, 2020·0 cites·18 claims
- 3452US11313877B2Near-zero power wakeup electro-mechanical systemKIONIX INC·Filed 2019·Granted Apr 26, 2022·0 cites·12 claims
- 3552US10393605B2Pressure sensor including deformable pressure vessel(s)KIONIX INC·Filed 2016·Granted Aug 27, 2019·0 cites·27 claims
- 3651US11885647B2Accelerometer apparatuses and systems for noise rejectionKIONIX INC·Filed 2022·Granted Jan 30, 2024·0 cites·14 claims
- 3750US11634317B2Composite spring for robust piezoelectric sensingKIONIX INC·Filed 2019·Granted Apr 25, 2023·0 cites·16 claims
- 3849US6800198B2Integrated monolithic microfabricated electrospray and liquid chromatography system and methodKIONIX INC·Filed 2000·Granted Oct 5, 2004·1 cites·49 claims
- 3948US10315915B2Electronic systems with through-substrate interconnects and MEMS deviceKIONIX INC·Filed 2015·Granted Jun 11, 2019·0 cites·25 claims
- 4047US2022252636A1Accelerometer apparatuses and systemsKIONIX INC·Filed 2022·Application pending·0 cites
- 4146US10843921B2Electrical connection to a micro electro-mechanical systemKIONIX INC·Filed 2019·Granted Nov 24, 2020·0 cites·7 claims
- 4245US6824697B2Method for fabricating mems and microfluidic devices using smile, latent masking, and delayed locos techniquesKIONIX INC·Filed 2001·Granted Nov 30, 2004·0 cites·6 claims
- 4343US2014278191A1Systems and Methods for Calibrating an AccelerometerKIONIX INC·Filed 2013·Application pending·0 cites
- 4442US2014297212A1Systems and Methods for Compensating for a Misalignment Angle Between an Accelerometer and a MagnetometerKIONIX INC·Filed 2013·Application pending·0 cites
- 4541US2022252635A1Mechanically-sensitive semiconducting triode capacitorKIONIX INC·Filed 2022·Application pending·0 cites
- 4634US9751757B2Single motor dynamic calibration unitKIONIX INC·Filed 2013·Granted Sep 5, 2017·0 cites·25 claims
- 4734US6969470B2Method for fabricating ESI device using smile and delayed LOCOS techniquesKIONIX INC·Filed 2003·Granted Nov 29, 2005·0 cites·7 claims
- 4833US2020141968A1Accelerometer having a root-mean-square (rms) outputKIONIX INC·Filed 2019·Application pending·0 cites
- 4932US2005066728A1Z-axis angular rate micro electro-mechanical systems (MEMS) sensorKIONIX INC·Filed 2004·Application pending·0 cites
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