Inventor · disambiguated record
Mark W. Utlaut
Also filed as: UTLAUT MARK · UTLAUT MARK W
44 granted patents·6 pending applications·664 citations·filing 1982–2018
98Inventor score
Top patents by PatentIndex Score
50 records- 0195US8405054B2Multi-source plasma focused ion beam systemSMITH NOEL·Filed 2011·Granted Mar 26, 2013·27 cites·8 claims
- 0295US8076650B2Multi-source plasma focused ion beam systemSMITH NOEL·Filed 2007·Granted Dec 13, 2011·44 cites·29 claims
- 0395US6900447B2Focused ion beam system with coaxial scanning electron microscopeFEI CO·Filed 2003·Granted May 31, 2005·77 cites·36 claims
- 0494US9934930B2High aspect ratio x-ray targets and uses of sameFEI CO·Filed 2015·Granted Apr 3, 2018·19 cites·11 claims
- 0594US8314410B2Combination laser and charged particle beam systemSTRAW MARCUS·Filed 2011·Granted Nov 20, 2012·22 cites·35 claims
- 0694US8168961B2Charged particle beam masking for laser ablation micromachiningSTRAW MARCUS·Filed 2008·Granted May 1, 2012·20 cites·21 claims
- 0793US9401262B2Multi-source plasma focused ion beam systemFEI CO·Filed 2015·Granted Jul 26, 2016·4 cites·19 claims
- 0893US8319181B2System and method for localization of large numbers of fluorescent markers in biological samplesPARKER N WILLIAM·Filed 2011·Granted Nov 27, 2012·13 cites·27 claims
- 0992US9040909B2System and method for simultaneous detection of secondary electrons and light in a charged particle beam systemFEI CO·Filed 2012·Granted May 26, 2015·10 cites·19 claims
- 1091US10366860B2High aspect ratio X-ray targets and uses of sameFEI CO·Filed 2018·Granted Jul 30, 2019·5 cites·21 claims
- 1191US8283629B1Aberration-corrected wien ExB mass filter with removal of neutrals from the BeamTUGGLE DAVID·Filed 2011·Granted Oct 9, 2012·18 cites·10 claims
- 1290US6683320B2Through-the-lens neutralization for charged particle beam systemFEI CO·Filed 2001·Granted Jan 27, 2004·32 cites·22 claims
- 1387US10493559B2Method and apparatus for laser machiningSTRAW MARCUS·Filed 2009·Granted Dec 3, 2019·10 cites·20 claims
- 1487US6414307B1Method and apparatus for enhancing yield of secondary ionsFEI CO·Filed 1999·Granted Jul 2, 2002·123 cites·21 claims
- 1586US8629416B2Charged particle beam masking for laser ablation micromachiningSTRAW MARCUS·Filed 2012·Granted Jan 14, 2014·5 cites·24 claims
- 1686US7009187B2Particle detector suitable for detecting ions and electronsFEI CO·Filed 2003·Granted Mar 7, 2006·28 cites·21 claims
- 1785US9029812B2Multi-source plasma focused ion beam systemFEI CO·Filed 2014·Granted May 12, 2015·4 cites·15 claims
- 1885US8642974B2Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolationKELLOGG SEAN·Filed 2011·Granted Feb 4, 2014·7 cites·20 claims
- 1985US8633452B2Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion sourceGRAUPERA ANTHONY·Filed 2011·Granted Jan 21, 2014·6 cites·19 claims
- 2084US6949756B2Shaped and low density focused ion beamsFEI CO·Filed 2001·Granted Sep 27, 2005·20 cites·29 claims
- 2183US9159534B2Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion sourceFEI CO·Filed 2014·Granted Oct 13, 2015·4 cites·20 claims
- 2283US6977386B2Angular aperture shaped beam system and methodFEI CO·Filed 2003·Granted Dec 20, 2005·18 cites·9 claims
- 2383US4528451AGap control system for localized vacuum processingVARIAN ASSOCIATES·Filed 1982·Granted Jul 9, 1985·64 cites·28 claims
- 2482US9591735B2High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumpedKELLOGG SEAN·Filed 2012·Granted Mar 7, 2017·5 cites·17 claims
- 2579US8164059B2In-chamber electron detectorGERLACH ROBERT·Filed 2008·Granted Apr 24, 2012·5 cites·27 claims
- 2678US9044781B2Microfluidics delivery systemsFEI CO·Filed 2012·Granted Jun 2, 2015·1 cites·11 claims
- 2777US8692217B2Multi-source plasma focused ion beam systemFEI CO·Filed 2013·Granted Apr 8, 2014·2 cites·10 claims
- 2877US4670685ALiquid metal ion source and alloy for ion emission of multiple ionic speciesHUGHES AIRCRAFT CO·Filed 1986·Granted Jun 2, 1987·25 cites·11 claims
- 2976US6797969B2Multi-column FIB for nanofabrication applicationsFEI CO·Filed 2001·Granted Sep 28, 2004·12 cites·30 claims
- 3071US8853592B2Method for laser machining a sample having a crystalline structureSTRAW MARCUS·Filed 2009·Granted Oct 7, 2014·2 cites·26 claims
- 3162US9733164B2Lamella creation method and device using fixed-angle beam and rotating sample stageWELLS ANDREW B·Filed 2012·Granted Aug 15, 2017·2 cites·18 claims
- 3258US8987678B2Encapsulation of electrodes in solid mediaKELLOGG SEAN·Filed 2012·Granted Mar 24, 2015·1 cites·25 claims
- 3357US9494516B2System and method for simultaneous detection of secondary electrons and light in a charged particle beam systemFEI CO·Filed 2015·Granted Nov 15, 2016·0 cites·20 claims
- 3453US9478390B2Integrated light optics and gas delivery in a charged particle lensFEI CO·Filed 2014·Granted Oct 25, 2016·0 cites·23 claims
- 3553US9053895B2System for attachment of an electrode into a plasma sourceKELLOGG SEAN·Filed 2011·Granted Jun 9, 2015·0 cites·22 claims
- 3652US9530625B2Method for attachment of an electrode into an inductively-coupled plasmaFEI CO·Filed 2015·Granted Dec 27, 2016·0 cites·16 claims
- 3751US9204036B2Image-enhancing spotlight mode for digital microscopyFEI CO·Filed 2013·Granted Dec 1, 2015·0 cites·24 claims
- 3851US2016032281A1Functionalized grids for locating and imaging biological specimens and methods of using the sameFEI CO·Filed 2014·Application pending·0 cites
- 3950US2012199738A1In-chamber electron detectorGERLACH ROBERT·Filed 2012·Application pending·0 cites
- 4049US8907296B2Charged particle beam system apertureFEI CO·Filed 2012·Granted Dec 9, 2014·0 cites·21 claims
- 4148US8759764B2On-axis detector for charged particle beam systemGRAUPERA ANTHONY·Filed 2012·Granted Jun 24, 2014·0 cites·19 claims
- 4246US2011163068A1Multibeam SystemUTLAUT MARK·Filed 2009·Application pending·0 cites
- 4346US2017002467A1Adaptive control for charged particle beam processingFEI CO·Filed 2016·Application pending·0 cites
- 4444US5008602ASignal generator for use in industrial positioning systemsHUGHES AIRCRAFT CO·Filed 1989·Granted Apr 16, 1991·12 cites·9 claims
- 4544US5006715AIon evaporation source for tinHUGHES AIRCRAFT CO·Filed 1989·Granted Apr 9, 1991·5 cites·6 claims
- 4643US4775818ALiquid metal ion source and alloyHUGHES AIRCRAFT CO·Filed 1986·Granted Oct 4, 1988·6 cites·13 claims
- 4740US2013250293A1Method and Apparatus for Actively Monitoring an Inductively-Coupled Plasma Ion Source using an Optical SpectrometerUTLAUT MARK W·Filed 2012·Application pending·0 cites
- 4837US2001032938A1Through-the-lens-collection of secondary particles for a focused ion beam systemFiled 2001·Application pending·0 cites
- 4933US4967250ACharge-coupled device with focused ion beam fabricationHUGHES AIRCRAFT CO·Filed 1989·Granted Oct 30, 1990·3 cites·15 claims
- 5032US5871848AEnhanced-wetting, boron-based liquid-metal ion source and methodOREGON GRADUATE INST SCIENCE·Filed 1997·Granted Feb 16, 1999·3 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →