Assignee
FEI CO
US·661 granted patents·233 pending applications·5,279 citations·filing 1991–2025
Top patents by PatentIndex Score
894 records- 0198US6457350B1Carbon nanotube probe tip grown on a small probeFEI CO·Filed 2000·Granted Oct 1, 2002·95 cites·28 claims
- 0297US11955310B2Transmission charged particle microscope with an electron energy loss spectroscopy detectorFEI CO·Filed 2021·Granted Apr 9, 2024·3 cites·10 claims
- 0397US7670455B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemFEI CO·Filed 2007·Granted Mar 2, 2010·48 cites·30 claims
- 0496US11460419B2Electron diffraction holographyFEI CO·Filed 2020·Granted Oct 4, 2022·4 cites·20 claims
- 0596US11183364B1Dual beam microscope system for imaging during sample processingFEI CO·Filed 2020·Granted Nov 23, 2021·7 cites·19 claims
- 0696US7767979B2Method for coupling and disconnecting a co-operative composite structure of a sample carrier and a sample holderFEI CO·Filed 2007·Granted Aug 3, 2010·26 cites·7 claims
- 0796US7348556B2Method of measuring three-dimensional surface roughness of a structureFEI CO·Filed 2005·Granted Mar 25, 2008·59 cites·24 claims
- 0896US7241361B2Magnetically enhanced, inductively coupled plasma source for a focused ion beam systemFEI CO·Filed 2004·Granted Jul 10, 2007·86 cites·20 claims
- 0996US6889113B2Graphical automated machine control and metrologyFEI CO·Filed 2002·Granted May 3, 2005·85 cites·34 claims
- 1096US5435850AGas injection systemFEI CO·Filed 1993·Granted Jul 25, 1995·164 cites·28 claims
- 1195US11906450B2Electron diffraction holographyFEI CO·Filed 2022·Granted Feb 20, 2024·2 cites·20 claims
- 1295US9818584B2Internal split faraday shield for a plasma sourceFEI CO·Filed 2014·Granted Nov 14, 2017·21 cites·17 claims
- 1395US7317515B2Method of localizing fluorescent markersFEI CO·Filed 2005·Granted Jan 8, 2008·29 cites·20 claims
- 1495US6900447B2Focused ion beam system with coaxial scanning electron microscopeFEI CO·Filed 2003·Granted May 31, 2005·77 cites·36 claims
- 1595US6211527B1Method for device editingFEI CO·Filed 1999·Granted Apr 3, 2001·143 cites·22 claims
- 1694US11127562B1System and method for RF pulsed electron beam based STEMFEI CO·Filed 2020·Granted Sep 21, 2021·3 cites·20 claims
- 1794US10224174B1Transmission charged particle microscope with imaging beam rotationFEI CO·Filed 2017·Granted Mar 5, 2019·18 cites·10 claims
- 1894US9934930B2High aspect ratio x-ray targets and uses of sameFEI CO·Filed 2015·Granted Apr 3, 2018·19 cites·11 claims
- 1994US8937282B2Mineral identification using mineral definitions including variabilityFEI CO·Filed 2012·Granted Jan 20, 2015·25 cites·3 claims
- 2094US8912490B2Method for preparing samples for imagingFEI CO·Filed 2013·Granted Dec 16, 2014·20 cites·9 claims
- 2194US7408178B2Method for the removal of a microscopic sample from a substrateFEI CO·Filed 2005·Granted Aug 5, 2008·26 cites·16 claims
- 2294US7308334B2Graphical automated machine control and metrologyFEI CO·Filed 2005·Granted Dec 11, 2007·27 cites·9 claims
- 2394US7064325B2Apparatus with permanent magnetic lensesFEI CO·Filed 2005·Granted Jun 20, 2006·20 cites·24 claims
- 2494US6963068B2Method for the manufacture and transmissive irradiation of a sample, and particle-optical systemFEI CO·Filed 2004·Granted Nov 8, 2005·72 cites·40 claims
- 2594US6753538B2Electron beam processingFEI CO·Filed 2002·Granted Jun 22, 2004·179 cites·49 claims
- 2694US6579665B2Thin-film magnetic recording head manufactureFEI CO·Filed 2002·Granted Jun 17, 2003·50 cites·6 claims
- 2793US11756762B2Rotating sample holder for random angle sampling in tomographyFEI CO·Filed 2022·Granted Sep 12, 2023·2 cites·15 claims
- 2893US11217425B2System and method for preparation and delivery of biological samples for charged particle analysisFEI CO·Filed 2020·Granted Jan 4, 2022·4 cites·26 claims
- 2993US10446366B1Imaging technique in scanning transmission charged particle microscopyFEI CO·Filed 2018·Granted Oct 15, 2019·13 cites·20 claims
- 3093US9620330B2Mathematical image assembly in a scanning-type microscopeFEI CO·Filed 2015·Granted Apr 11, 2017·15 cites·20 claims
- 3193US9601313B2Automated TEM sample preparationFEI CO·Filed 2015·Granted Mar 21, 2017·14 cites·20 claims
- 3293US9401262B2Multi-source plasma focused ion beam systemFEI CO·Filed 2015·Granted Jul 26, 2016·4 cites·19 claims
- 3393US9312098B2Method of examining a sample in a charged-particle microscopeFEI CO·Filed 2015·Granted Apr 12, 2016·16 cites·20 claims
- 3493US9064811B2Precursor for planar deprocessing of semiconductor devices using a focused ion beamFEI CO·Filed 2013·Granted Jun 23, 2015·12 cites·8 claims
- 3593US8890064B2Method for S/TEM sample analysisFEI CO·Filed 2013·Granted Nov 18, 2014·12 cites·8 claims
- 3693US8772716B2Phase plate for a TEMFEI CO·Filed 2013·Granted Jul 8, 2014·12 cites·11 claims
- 3793US8729469B1Multiple sample attachment to nano manipulator for high throughput sample preparationFEI CO·Filed 2013·Granted May 20, 2014·18 cites·17 claims
- 3893US7915584B2TEM with aberration corrector and phase plateFEI CO·Filed 2009·Granted Mar 29, 2011·19 cites·26 claims
- 3993US6268608B1Method and apparatus for selective in-situ etching of inter dielectric layersFEI CO·Filed 1998·Granted Jul 31, 2001·122 cites·37 claims
- 4092US12175648B2Method implemented by a data processing apparatus, and charged particle beam device for inspecting a specimen using such a methodFEI CO·Filed 2023·Granted Dec 24, 2024·2 cites·22 claims
- 4192US12061159B2Particle-induced x-ray emission (PIXE) using hydrogen and multi-species focused ion beamsFEI CO·Filed 2022·Granted Aug 13, 2024·2 cites·28 claims
- 4292US11651928B2Reentrant gas system for charged particle microscopeFEI CO·Filed 2021·Granted May 16, 2023·2 cites·20 claims
- 4392US11513079B2Method and system for wafer defect inspectionFEI CO·Filed 2020·Granted Nov 29, 2022·4 cites·19 claims
- 4492US10928335B2Adaptive specimen image acquisition using an artificial neural networkFEI CO·Filed 2019·Granted Feb 23, 2021·4 cites·20 claims
- 4592US9040909B2System and method for simultaneous detection of secondary electrons and light in a charged particle beam systemFEI CO·Filed 2012·Granted May 26, 2015·10 cites·19 claims
- 4692US8822921B2Method for preparing samples for imagingFEI CO·Filed 2013·Granted Sep 2, 2014·11 cites·15 claims
- 4792US8011259B2Sample carrier comprising a deformable strip of material folded back upon itself and sample holderFEI CO·Filed 2010·Granted Sep 6, 2011·11 cites·18 claims
- 4892US7906762B2Compact scanning electron microscopeFEI CO·Filed 2007·Granted Mar 15, 2011·25 cites·16 claims
- 4992US7544523B2Method of fabricating nanodevicesFEI CO·Filed 2006·Granted Jun 9, 2009·19 cites·35 claims
- 5092US7442924B2Repetitive circumferential milling for sample preparationFEI CO·Filed 2006·Granted Oct 28, 2008·41 cites·31 claims
Showing the top 50 of 894 patent records by PatentIndex Score.
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