Inventor · disambiguated record
Damien Slevin
Also filed as: SLEVIN DAMIEN · SLEVIN DAMIEN M · SLEVIN DAMIEN MARTIN
17 granted patents·4 pending applications·589 citations·filing 2002–2022
92Inventor score
Top patents by PatentIndex Score
21 records- 0198US8940646B1Sequential precursor dosing in an ALD multi-station/batch reactorLAM RES CORP·Filed 2013·Granted Jan 27, 2015·540 cites·26 claims
- 0296US10358722B2Showerhead assemblyLAM RES CORP·Filed 2015·Granted Jul 23, 2019·15 cites·20 claims
- 0391US12243725B2High temperature RF connection with integral thermal chokeLAM RES CORP·Filed 2022·Granted Mar 4, 2025·1 cites·20 claims
- 0490US11469084B2High temperature RF connection with integral thermal chokeLAM RES CORP·Filed 2017·Granted Oct 11, 2022·6 cites·20 claims
- 0585US10190216B1Showerhead tilt mechanismLAM RES CORP·Filed 2017·Granted Jan 29, 2019·5 cites·20 claims
- 0685US9236244B2Sequential precursor dosing in an ALD multi-station/batch reactorLAM RES CORP·Filed 2014·Granted Jan 12, 2016·5 cites·20 claims
- 0779US8628618B2Precursor vapor generation and delivery system with filters and filter monitoring systemSLEVIN DAMIEN·Filed 2010·Granted Jan 14, 2014·4 cites·10 claims
- 0874US8985152B2Point of use valve manifold for semiconductor fabrication equipmentCHANDRASEKHARAN RAMESH·Filed 2012·Granted Mar 24, 2015·5 cites·30 claims
- 0969US10693433B2Electrostatic chuck filter box and mounting bracketLAM RES CORP·Filed 2018·Granted Jun 23, 2020·1 cites·27 claims
- 1066US12322641B2Mechanical indexer for multi-station process moduleLAM RES CORP·Filed 2021·Granted Jun 3, 2025·0 cites·9 claims
- 1159US10944374B2Electrostatic chuck filter box and mounting bracketLAM RES CORP·Filed 2020·Granted Mar 9, 2021·0 cites·19 claims
- 1258USD956705SCooling plate for a semiconductor processing apparatusLAM RES CORP·Filed 2020·Granted Jul 5, 2022·3 cites·1 claims
- 1355US10774588B2Cluster tool system with step ladder assemblyLAM RES CORP·Filed 2019·Granted Sep 15, 2020·0 cites·21 claims
- 1454US10760160B2Showerhead tilt mechanismLAM RES CORP·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 1553US2025046644A1Wafer transfer paddles with minimum contact area structures for reduced backside markingLAM RES CORP·Filed 2022·Application pending·0 cites
- 1651US2022199379A1High temperature heating of a substrate in a processing chamberLAM RES CORP·Filed 2020·Application pending·0 cites
- 1750US10378279B2Step ladder with component rack system for fabrication facilityLAM RES CORP·Filed 2017·Granted Aug 13, 2019·0 cites·19 claims
- 1848US9637821B2Method for supplying vaporized precursorLAM RES CORP·Filed 2013·Granted May 2, 2017·0 cites·11 claims
- 1946US6904226B2Apparatus and method for preparing a coated optical fiberFiled 2002·Granted Jun 7, 2005·4 cites·17 claims
- 2042US2024213060A1Apparatuses for measuring gap between a substrate support plane and gas distribution deviceLAM RES CORP·Filed 2022·Application pending·0 cites
- 2136US2019376184A1Chemical vapor deposition shower head for uniform gas distributionLAM RES CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →