Inventor · disambiguated record
Günes Nakiboglu
Also filed as: NAKIBOGLU GÜNES · NAKIBOĞLU GÜNEŞ
17 granted patents·3 pending applications·10 citations·filing 2015–2022
88Inventor score
Files withASML NETHERLANDS BV20
Top patents by PatentIndex Score
20 records- 0183US10222713B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·2 cites·20 claims
- 0279US10241422B2Lithography apparatus and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2016·Granted Mar 26, 2019·2 cites·21 claims
- 0377US10895808B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2016·Granted Jan 19, 2021·2 cites·19 claims
- 0476US9939740B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 10, 2018·2 cites·21 claims
- 0574US10495985B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Dec 3, 2019·1 cites·23 claims
- 0668US9977348B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted May 22, 2018·1 cites·20 claims
- 0766US11579533B2Substrate holder, a lithographic apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 0861US10990025B2Patterning device cooling apparatusASML NETHERLANDS BV·Filed 2019·Granted Apr 27, 2021·0 cites·21 claims
- 0960US10571810B2Substrate table, a lithographic apparatus and a method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 1057US12411424B2Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an objectASML NETHERLANDS BV·Filed 2022·Granted Sep 9, 2025·0 cites·20 claims
- 1157US10345717B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2018·Granted Jul 9, 2019·0 cites·23 claims
- 1253US10317804B2Substrate table, lithographic apparatus and method of operating a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jun 11, 2019·0 cites·20 claims
- 1350US2020124976A1Radiation Source Module and Lithographic ApparatusASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 1449US10114295B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·21 claims
- 1543US2025021022A1Electrostatic holder, object table and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1639US10877384B1Radiation shielding device and apparatus comprising such shielding deviceASML NETHERLANDS BV·Filed 2019·Granted Dec 29, 2020·0 cites·19 claims
- 1739US10114299B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·19 claims
- 1838US11009800B2Measurement system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 18, 2021·0 cites·20 claims
- 1937US10133197B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Nov 20, 2018·0 cites·20 claims
- 2036US2018101099A1Lithographic ApparatusASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →