Inventor · disambiguated record
Laksh Karuppiah
Also filed as: KARUPPIAH LAKSH
2 granted patents·2 pending applications·2 citations·filing 2006–2015
42Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0164US9496190B2Feedback of layer thickness timing and clearance timing for polishing controlAPPLIED MATERIALS INC·Filed 2015·Granted Nov 15, 2016·1 cites·21 claims
- 0263US8989890B2GST film thickness monitoringXU KUN·Filed 2010·Granted Mar 24, 2015·1 cites·17 claims
- 0340US2007062815A1Method for stabilized polishing processAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0439US2006169674A1Method and composition for polishing a substrateMAO DAXIN·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →