Inventor · disambiguated record
Chris L. Koliopoulos
Also filed as: KOLIOPOULOS CHRIS · KOLIOPOULOS CHRIS L
7 granted patents·1 pending application·103 citations·filing 1978–2014
86Inventor score
Top patents by PatentIndex Score
8 records- 0190US8045175B2Equal-path interferometerZYGO CORP·Filed 2010·Granted Oct 25, 2011·14 cites·51 claims
- 0286US7557910B2System and method for controlling a beam source in a workpiece surface inspection systemKLA TENCOR CORP·Filed 2005·Granted Jul 7, 2009·6 cites·12 claims
- 0384US7324917B2Method, system, and software for evaluating characteristics of a surface with reference to its edgeKLA TENCOR TECH CORP·Filed 2005·Granted Jan 29, 2008·13 cites·54 claims
- 0482US7839495B2System and method for controlling a beam source in a workpiece surface inspection systemKLA TENCOR CORP·Filed 2009·Granted Nov 23, 2010·3 cites·15 claims
- 0582US5471307ASheet flatness measurement system and methodPHASE SHIFT TECHNOLOGY INC·Filed 1992·Granted Nov 28, 1995·50 cites·19 claims
- 0659US7541826B2Compliant pad wafer chuckKLA TENCOR CORP·Filed 2005·Granted Jun 2, 2009·5 cites·5 claims
- 0750US6304325B1Variable shear A. C. interferometerRAYTHEON CO·Filed 1978·Granted Oct 16, 2001·12 cites·7 claims
- 0850US2014268105A1Optical defect inspection systemZYGO CORP·Filed 2014·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Chris L. Koliopoulos files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →