Inventor · disambiguated record
Hiroaki Narushima
Also filed as: NARUSHIMA HIROAKI
3 granted patents·3 pending applications·95 citations·filing 2000–2003
75Inventor score
Files withNIKON CORP6
Top patents by PatentIndex Score
6 records- 0190US6888621B2Mask-holding apparatus for a light exposure apparatus and related scanning-exposure methodNIKON CORP·Filed 2003·Granted May 3, 2005·32 cites·37 claims
- 0290US6583597B2Stage apparatus including non-containing gas bearings and microlithography apparatus comprising sameNIKON CORP·Filed 2001·Granted Jun 24, 2003·32 cites·62 claims
- 0382US6549277B1Illuminance meter, illuminance measuring method and exposure apparatusNIKON CORP·Filed 2000·Granted Apr 15, 2003·31 cites·23 claims
- 0439US2003179354A1Mask-holding apparatus for a light exposure apparatus and related scanning-exposure methodNIKON CORP·Filed 2003·Application pending·0 cites
- 0538US2004075201A1Shock-absorber units for use in a vacuum chamber for braking runaway moving objectsNIKON CORP·Filed 2003·Application pending·0 cites
- 0635US2003178579A1Stage devices exhibiting reduced deformation, and microlithography systems comprising sameNIKON CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →