Inventor · disambiguated record
Judon Tony Pan
Also filed as: PAN JUDON T · PAN JUDON TONY
6 granted patents·3 pending applications·395 citations·filing 1998–2013
87Inventor score
Top patents by PatentIndex Score
9 records- 0196US6296548B1Method and apparatus for optical monitoring in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted Oct 2, 2001·132 cites·15 claims
- 0295US6280289B1Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layersAPPLIED MATERIALS INC·Filed 1998·Granted Aug 28, 2001·187 cites·22 claims
- 0391US6652355B2Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layersAPPLIED MATERIALS INC·Filed 2001·Granted Nov 25, 2003·44 cites·20 claims
- 0490US9023723B2Method of fabricating a gate-all-around word line for a vertical channel DRAMCHANG CHORNG-PING·Filed 2013·Granted May 5, 2015·13 cites·10 claims
- 0569US6913511B2Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layersAPPLIED MATERIALS INC·Filed 2003·Granted Jul 5, 2005·9 cites·20 claims
- 0665US6659842B2Method and apparatus for optical monitoring in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2001·Granted Dec 9, 2003·10 cites·27 claims
- 0749US2006246683A1Integrated equipment set for forming a low K dielectric interconnect on a substrateAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0841US2004007325A1Integrated equipment set for forming a low K dielectric interconnect on a substrateAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 0935US2005048772A1Bond pad techniques for integrated circuitsAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →