Inventor · disambiguated record
Anqing Cui
Also filed as: CUI ANQING
11 granted patents·4 pending applications·108 citations·filing 2002–2023
88Inventor score
Top patents by PatentIndex Score
15 records- 0197US11715667B2Thermal process chamber lid with backside pumpingAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·5 cites·10 claims
- 0291US9312154B2CVD apparatus for improved film thickness non-uniformity and particle performanceTRAN BINH·Filed 2010·Granted Apr 12, 2016·17 cites·20 claims
- 0391US6617553B2Multi-zone resistive heaterAPPLIED MATERIALS INC·Filed 2002·Granted Sep 9, 2003·59 cites·62 claims
- 0490US11335591B2Thermal process chamber lid with backside pumpingAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·2 cites·11 claims
- 0589US10407771B2Atomic layer deposition chamber with thermal lidAPPLIED MATERIALS INC·Filed 2014·Granted Sep 10, 2019·12 cites·18 claims
- 0688US8618446B2Substrate support with substrate heater and symmetric RF returnCHANG YU·Filed 2011·Granted Dec 31, 2013·12 cites·22 claims
- 0779US12387975B2Thermal process chamber lid with backside pumpingAPPLIED MATERIALS INC·Filed 2023·Granted Aug 12, 2025·0 cites·19 claims
- 0870US12054826B2ALD cycle time reduction using process chamber lid with tunable pumpingAPPLIED MATERIALS INC·Filed 2023·Granted Aug 6, 2024·0 cites·15 claims
- 0955US9892941B2Multi-zone resistive heaterCUI ANQING·Filed 2009·Granted Feb 13, 2018·1 cites·20 claims
- 1055US2021262092A1Sequential pulse and purge for ald processesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1154US11767590B2ALD cycle time reduction using process chamber lid with tunable pumpingAPPLIED MATERIALS INC·Filed 2020·Granted Sep 26, 2023·0 cites·19 claims
- 1254US9202674B2Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elementsCUVALCI OLKAN·Filed 2008·Granted Dec 1, 2015·0 cites·9 claims
- 1353US2021404059A1Processing system and method of controlling conductance in a processing systemAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1443US2008197125A1Substrate heating method and apparatusAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1541US2007125762A1Multi-zone resistive heaterAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →