Inventor · disambiguated record
Mariusch Gregor
Also filed as: GREGOR MARIUSCH · GREGOR MARIUSCH J
24 granted patents·3 pending applications·443 citations·filing 1997–2025
95Inventor score
Top patents by PatentIndex Score
27 records- 0197US8397739B2N-channel flow ratio controller calibrationGREGOR MARIUSCH·Filed 2011·Granted Mar 19, 2013·27 cites·20 claims
- 0294US10403476B2Active showerheadLAM RES CORP·Filed 2016·Granted Sep 3, 2019·9 cites·19 claims
- 0392US5944049AApparatus and method for regulating a pressure in a chamberAPPLIED MATERIALS INC·Filed 1997·Granted Aug 31, 1999·259 cites·43 claims
- 0491US8205629B2Real time lead-line characterization for MFC flow verificationGREGOR MARIUSCH·Filed 2009·Granted Jun 26, 2012·24 cites·20 claims
- 0591US6800833B2Electromagnetically levitated substrate supportFiled 2002·Granted Oct 5, 2004·75 cites·27 claims
- 0687US10804079B2Active showerheadLAM RES CORP·Filed 2019·Granted Oct 13, 2020·3 cites·18 claims
- 0786US9004107B2Methods and apparatus for enhanced gas flow rate controlGREGOR MARIUSCH·Filed 2012·Granted Apr 14, 2015·9 cites·20 claims
- 0886US8707754B2Methods and apparatus for calibrating flow controllers in substrate processing systemsCRUSE JAMES P·Filed 2010·Granted Apr 29, 2014·10 cites·20 claims
- 0985US12215421B2Systems and methods for pulse width modulated dose controlLAM RES CORP·Filed 2023·Granted Feb 4, 2025·0 cites·13 claims
- 1085US9200754B2N-channel flow ratio controller calibrationGREGOR MARIUSCH·Filed 2013·Granted Dec 1, 2015·6 cites·17 claims
- 1185US8880210B2Methods and apparatus for processing substrates using model-based controlPORTHOUSE KEITH BRIAN·Filed 2011·Granted Nov 4, 2014·9 cites·21 claims
- 1283US11796085B2Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipmentLAM RES CORP·Filed 2020·Granted Oct 24, 2023·1 cites·15 claims
- 1382US11834736B2Systems and methods for pulse width modulated dose controlLAM RES CORP·Filed 2023·Granted Dec 5, 2023·0 cites·13 claims
- 1478US2025179634A1Systems and methods for pulse width modulated dose controlLAM RES CORP·Filed 2025·Application pending·0 cites
- 1576US9772629B2Methods for monitoring a flow controller coupled to a process chamberAPPLIED MATERIALS INC·Filed 2012·Granted Sep 26, 2017·4 cites·14 claims
- 1675US12253190B2Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipmentLAM RES CORP·Filed 2023·Granted Mar 18, 2025·0 cites·20 claims
- 1775US2024355596A1Turbomolecular pump and cathode assembly for etching reactorLAM RES CORP·Filed 2024·Application pending·0 cites
- 1873US10222810B2Methods for monitoring a flow controller coupled to a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Mar 5, 2019·2 cites·16 claims
- 1972US10428807B2Pump power consumption enhancementAPPLIED MATERIALS INC·Filed 2012·Granted Oct 1, 2019·2 cites·13 claims
- 2065US9644796B2Methods for in-situ calibration of a flow controllerAPPLIED MATERIALS INC·Filed 2012·Granted May 9, 2017·3 cites·20 claims
- 2164US11542598B2Systems and methods for pulse width modulated dose controlLAM RES CORP·Filed 2018·Granted Jan 3, 2023·0 cites·16 claims
- 2261US12106946B2Turbomolecular pump and cathode assembly for etching reactorLAM RES CORP·Filed 2020·Granted Oct 1, 2024·0 cites·13 claims
- 2348US8015989B2Method and apparatus for dampening pressure fluctuations in a fluid delivery systemAPPLIED MATERIALS INC·Filed 2008·Granted Sep 13, 2011·0 cites·17 claims
- 2447US9327252B2Compact device for enhancing the mixing of gaseous speciesAPPLIED MATERIALS INC·Filed 2013·Granted May 3, 2016·0 cites·16 claims
- 2546US10108205B2Method and system for controlling a flow ratio controller using feed-forward adjustmentAPPLIED MATERIALS INC·Filed 2013·Granted Oct 23, 2018·0 cites·20 claims
- 2645US10114389B2Method and system for controlling a flow ratio controller using feedbackAPPLIED MATERIALS INC·Filed 2013·Granted Oct 30, 2018·0 cites·20 claims
- 2744US2022171370A1High density, controlled integrated circuits factoryLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →