Inventor · disambiguated record
Tsz-Sin Siu
Also filed as: SIU TSZ-SIN
8 granted patents·156 citations·filing 2004–2016
88Inventor score
Top patents by PatentIndex Score
8 records- 0195US8088299B2Multiple zone carrier head with flexible membraneCHEN HUNG CHIH·Filed 2010·Granted Jan 3, 2012·22 cites·13 claims
- 0295US7255771B2Multiple zone carrier head with flexible membraneAPPLIED MATERIALS INC·Filed 2004·Granted Aug 14, 2007·82 cites·25 claims
- 0393US8808062B2Multi-chamber carrier head with a textured membraneAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·8 cites·14 claims
- 0487US10702971B2Textured membrane for a multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2016·Granted Jul 7, 2020·2 cites·12 claims
- 0584US9452505B2Textured membrane for a multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2014·Granted Sep 27, 2016·2 cites·12 claims
- 0684US8454413B2Multi-chamber carrier head with a textured membraneOH JEONGHOON·Filed 2006·Granted Jun 4, 2013·10 cites·5 claims
- 0784US7842158B2Multiple zone carrier head with flexible membraneAPPLIED MATERIALS INC·Filed 2007·Granted Nov 30, 2010·7 cites·26 claims
- 0882US7081042B2Substrate removal from polishing toolAPPLIED MATERIALS INC·Filed 2004·Granted Jul 25, 2006·23 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →