Inventor · disambiguated record
David H. Loo
Also filed as: LOO DAVID · LOO DAVID H
5 granted patents·89 citations·filing 1996–2014
81Inventor score
Top patents by PatentIndex Score
5 records- 0193US9818585B2In situ plasma clean for removal of residue from pedestal surface without breaking vacuumAPPLIED MATERIALS INC·Filed 2014·Granted Nov 14, 2017·9 cites·20 claims
- 0279US8900471B2In situ plasma clean for removal of residue from pedestal surface without breaking vacuumGREEN RICHARD J·Filed 2010·Granted Dec 2, 2014·6 cites·17 claims
- 0376US6625003B2Method and apparatus for balancing an electrostatic force produced by an electrostatic chuckAPPLIED MATERIALS INC·Filed 2002·Granted Sep 23, 2003·22 cites·28 claims
- 0472US5818682AMethod and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Oct 6, 1998·48 cites·22 claims
- 0554US6875927B2High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applicationsAPPLIED MATERIALS INC·Filed 2002·Granted Apr 5, 2005·4 cites·28 claims
Join the waitlist — get patent alerts
Get an alert when David H. Loo files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →