Inventor · disambiguated record
Andrew J. Nagengast
Also filed as: NAGENGAST ANDREW · NAGENGAST ANDREW J
57 granted patents·21 pending applications·637 citations·filing 1998–2024
98Inventor score
Top patents by PatentIndex Score
78 records- 0196US9368371B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2014·Granted Jun 14, 2016·21 cites·15 claims
- 0296US7950985B2Flexible membrane for carrier headAPPLIED MATERIALS INC·Filed 2010·Granted May 31, 2011·27 cites·14 claims
- 0396US7575504B2Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assemblyAPPLIED MATERIALS INC·Filed 2007·Granted Aug 18, 2009·41 cites·31 claims
- 0495US12033865B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2023·Granted Jul 9, 2024·1 cites·15 claims
- 0595US8469776B2Flexible membrane for carrier headZUNIGA STEVEN M·Filed 2011·Granted Jun 25, 2013·20 cites·17 claims
- 0695US8021215B2Carrier head with retaining ring and carrier ringAPPLIED MATERIALS INC·Filed 2010·Granted Sep 20, 2011·19 cites·18 claims
- 0795US7727055B2Flexible membrane for carrier headAPPLIED MATERIALS INC·Filed 2007·Granted Jun 1, 2010·28 cites·16 claims
- 0895US7699688B2Carrier ring for carrier headAPPLIED MATERIALS INC·Filed 2007·Granted Apr 20, 2010·26 cites·25 claims
- 0995US7654888B2Carrier head with retaining ring and carrier ringAPPLIED MATERIALS INC·Filed 2007·Granted Feb 2, 2010·33 cites·17 claims
- 1095US7527271B2Fast substrate loading on polishing head without membrane inflation stepAPPLIED MATERIALS INC·Filed 2007·Granted May 5, 2009·32 cites·17 claims
- 1194US11682561B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2021·Granted Jun 20, 2023·2 cites·19 claims
- 1294US10500695B2Retaining ring having inner surfaces with featuresAPPLIED MATERIALS INC·Filed 2016·Granted Dec 10, 2019·9 cites·14 claims
- 1393US12048981B2Retaining ring having inner surfaces with featuresAPPLIED MATERIALS INC·Filed 2022·Granted Jul 30, 2024·1 cites·9 claims
- 1493US8808062B2Multi-chamber carrier head with a textured membraneAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·8 cites·14 claims
- 1592US11056350B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2016·Granted Jul 6, 2021·6 cites·14 claims
- 1692US7901273B2Carrier ring for carrier headAPPLIED MATERIALS INC·Filed 2010·Granted Mar 8, 2011·11 cites·21 claims
- 1791US11623321B2Polishing head retaining ring tilting moment controlAPPLIED MATERIALS INC·Filed 2020·Granted Apr 11, 2023·2 cites·14 claims
- 1891US11400560B2Retaining ring designAPPLIED MATERIALS INC·Filed 2018·Granted Aug 2, 2022·6 cites·20 claims
- 1990US11453099B2Retaining ring having inner surfaces with featuresAPPLIED MATERIALS INC·Filed 2019·Granted Sep 27, 2022·3 cites·13 claims
- 2088US12434348B2Retaining ring having inner surfaces with featuresAPPLIED MATERIALS INC·Filed 2024·Granted Oct 7, 2025·0 cites·7 claims
- 2188US6132289AApparatus and method for film thickness measurement integrated into a wafer load/unload unitLAM RES CORP·Filed 1998·Granted Oct 17, 2000·101 cites·18 claims
- 2287US10702971B2Textured membrane for a multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2016·Granted Jul 7, 2020·2 cites·12 claims
- 2385US12330262B2Dual membrane carrier head for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2023·Granted Jun 17, 2025·0 cites·6 claims
- 2484US10322492B2Retaining ring for CMPAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·3 cites·18 claims
- 2584US9610672B2Configurable pressure design for multizone chemical mechanical planarization polishing headAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·5 cites·16 claims
- 2684US9452505B2Textured membrane for a multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2014·Granted Sep 27, 2016·2 cites·12 claims
- 2784US8535121B2Retaining ring and articles for carrier headAPPLIED MATERIALS INC·Filed 2013·Granted Sep 17, 2013·3 cites·18 claims
- 2884US8454413B2Multi-chamber carrier head with a textured membraneOH JEONGHOON·Filed 2006·Granted Jun 4, 2013·10 cites·5 claims
- 2983US11724357B2Pivotable substrate retaining ringAPPLIED MATERIALS INC·Filed 2022·Granted Aug 15, 2023·0 cites·10 claims
- 3083US2023405758A1Polishing carrier head with multiple zonesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3182US11511390B2Pivotable substrate retaining ringAPPLIED MATERIALS INC·Filed 2019·Granted Nov 29, 2022·1 cites·9 claims
- 3280US2023381915A1Operation of clamping retainer for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3380US2023381917A1Clamping retainer for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3479US6325706B1Use of zeta potential during chemical mechanical polishing for end point detectionLAM RES CORP·Filed 1998·Granted Dec 4, 2001·54 cites·23 claims
- 3577US11890715B2Polishing carrier head with piezoelectric pressure controlAPPLIED MATERIALS INC·Filed 2021·Granted Feb 6, 2024·0 cites·20 claims
- 3677US8151852B2Bonding apparatus and methodZUNIGA STEVEN M·Filed 2009·Granted Apr 10, 2012·5 cites·11 claims
- 3777US6328637B1Method and apparatus for conditioning a polishing pad used in chemical mechanical planarizationLAM RES CORP·Filed 2000·Granted Dec 11, 2001·17 cites·20 claims
- 3876US12251788B2Polishing head with local wafer pressureAPPLIED MATERIALS INC·Filed 2024·Granted Mar 18, 2025·0 cites·20 claims
- 3976US12030156B2Polishing carrier head with piezoelectric pressure controlAPPLIED MATERIALS INC·Filed 2021·Granted Jul 9, 2024·0 cites·18 claims
- 4076US6592439B1Platen for retaining polishing materialAPPLIED MATERIALS INC·Filed 2000·Granted Jul 15, 2003·22 cites·43 claims
- 4175US11780049B2Polishing carrier head with multiple angular pressurizable zonesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·0 cites·19 claims
- 4275US6186865B1Apparatus and method for performing end point detection on a linear planarization toolLAM RES CORP·Filed 1998·Granted Feb 13, 2001·38 cites·30 claims
- 4373US6086460AMethod and apparatus for conditioning a polishing pad used in chemical mechanical planarizationLAM RES CORP·Filed 1998·Granted Jul 11, 2000·41 cites·30 claims
- 4473US2024173816A1Deformable substrate chuckAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4572US2025235977A1Polishing head with retaining ring wear sensingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4671US11660721B2Dual loading retaining ringAPPLIED MATERIALS INC·Filed 2021·Granted May 30, 2023·0 cites·20 claims
- 4771US8376813B2Retaining ring and articles for carrier headAPPLIED MATERIALS INC·Filed 2010·Granted Feb 19, 2013·1 cites·6 claims
- 4871US2025269488A1Electrical connection for chemical mechanical polishing carrier headAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4970US2024253183A1Apparatus and method for controlling substrate polish edge uniformityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 5069US2025114896A1Individually rotatable platens and control of carrier head sweepAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
Showing the top 50 of 78 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →