Inventor · disambiguated record
Thomas Laursen
Also filed as: LAURSEN THOMAS · LAURSEN THOMAS A · LAURSEN THOMAS ALFRED
21 granted patents·4 pending applications·561 citations·filing 1992–2019
96Inventor score
Files withSPEEDFAM IPEC CORP7NOVELLUS SYSTEMS INC6BABCOCK & WILCOX CO2GEN ELECTRIC2BABCOCK & WILCOX POWER GENERAT1
Top patents by PatentIndex Score
25 records- 0195US7115017B1Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarizationNOVELLUS SYSTEMS INC·Filed 2006·Granted Oct 3, 2006·272 cites·21 claims
- 0289US7264537B1Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring systemNOVELLUS SYSTEMS INC·Filed 2006·Granted Sep 4, 2007·19 cites·21 claims
- 0383US6572445B2Multizone slurry delivery for chemical mechanical polishing toolSPEEDFAM IPEC·Filed 2001·Granted Jun 3, 2003·25 cites·16 claims
- 0482US7887396B2Method and apparatus for controlled slurry distributionNOVELLUS SYSTEMS INC·Filed 2006·Granted Feb 15, 2011·8 cites·26 claims
- 0580US6923711B2Multizone carrier with process monitoring system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2001·Granted Aug 2, 2005·25 cites·22 claims
- 0678US6960115B2Multiprobe detection system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2003·Granted Nov 1, 2005·19 cites·24 claims
- 0777US6821794B2Flexible snapshot in endpoint detectionNOVELLUS SYSTEMS INC·Filed 2002·Granted Nov 23, 2004·33 cites·24 claims
- 0876US6805613B1Multiprobe detection system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 19, 2004·17 cites·29 claims
- 0974US7314402B2Method and apparatus for controlling slurry distributionSPEEDFAM IPEC CORP·Filed 2001·Granted Jan 1, 2008·15 cites·8 claims
- 1073US6258711B1Sacrificial deposit to improve damascene pattern planarization in semiconductor wafersSPEEDFAM IPEC CORP·Filed 1999·Granted Jul 10, 2001·42 cites·24 claims
- 1170US5205226ALow NOx burner systemBABCOCK & WILCOX CO·Filed 1992·Granted Apr 27, 1993·33 cites·20 claims
- 1266US9019466B2Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply systemLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2007·Granted Apr 28, 2015·2 cites·28 claims
- 1366US6521537B1Modification to fill layers for inlaying semiconductor patternsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 18, 2003·10 cites·17 claims
- 1454US12050193B2Magnesium ion selective membranesRADIOMETER MEDICAL APS·Filed 2019·Granted Jul 30, 2024·0 cites·22 claims
- 1552US8042497B2Steam generator arrangementBABCOCK & WILCOX POWER GENERAT·Filed 2008·Granted Oct 25, 2011·1 cites·5 claims
- 1650US6555466B1Two-step chemical-mechanical planarization for damascene structures on semiconductor wafersSPEEDFAM CORP·Filed 1999·Granted Apr 29, 2003·17 cites·3 claims
- 1748US7004086B2Injection of overfire air through the upper furnace arch for penetration and mixing with flue gasGEN ELECTRIC·Filed 2004·Granted Feb 28, 2006·6 cites·11 claims
- 1847US5505146ABurner pattern to minimize sidewall corrosion potentialBABCOCK & WILCOX CO·Filed 1995·Granted Apr 9, 1996·12 cites·18 claims
- 1942US2006255016A1Method for polishing copper on a workpiece surfaceNOVELLUS SYSTEMS INC·Filed 2006·Application pending·0 cites
- 2038US2005026542A1Detection system for chemical-mechanical planarization toolFiled 2003·Application pending·0 cites
- 2137US7622052B1Methods for chemical mechanical planarization and for detecting endpoint of a CMP operationNOVELLUS SYSTEMS INC·Filed 2006·Granted Nov 24, 2009·0 cites·10 claims
- 2237US2003134576A1Method for polishing copper on a workpiece surfaceFiled 2002·Application pending·0 cites
- 2337US2005016861A1Method for planarizing a work pieceFiled 2003·Application pending·0 cites
- 2433US6387188B1Pad conditioning for copper-based semiconductor wafersSPEEDFAM IPEC CORP·Filed 1999·Granted May 14, 2002·5 cites·5 claims
- 2529US6869354B2Zero cooling air flow overfire air injector and related methodGEN ELECTRIC·Filed 2002·Granted Mar 22, 2005·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →