Inventor · disambiguated record
Obert R. Wood, Ii
Also filed as: WOOD II OBERT R · WOOD II OBERT REEVES · WOOD OBERT R
28 granted patents·3 pending applications·623 citations·filing 1976–2017
97Inventor score
Files withGLOBALFOUNDRIES INC11BELL TELEPHONE LABOR INC8AT & T CORP3ADVANCED MICRO DEVICES INC2AT & T BELL LAB2
Top patents by PatentIndex Score
31 records- 0197US4054846ATransverse-excitation laser with preionizationBELL TELEPHONE LABOR INC·Filed 1976·Granted Oct 18, 1977·71 cites·20 claims
- 0295US8198611B2Laser beam formatting module and method for fabricating semiconductor dies using sameLAFONTAINE BRUNO M·Filed 2007·Granted Jun 12, 2012·90 cites·20 claims
- 0393US6847433B2Holder, system, and process for improving overlay in lithographyAGERE SYSTEMS INC·Filed 2002·Granted Jan 25, 2005·55 cites·35 claims
- 0492US7723704B2EUV pellicle with increased EUV light transmittanceGLOBALFOUNDRIES INC·Filed 2006·Granted May 25, 2010·15 cites·15 claims
- 0590US9436078B2Method for a low profile etchable EUV absorber layer with embedded particles in a photolithography maskGLOBALFOUNDRIES INC·Filed 2015·Granted Sep 6, 2016·4 cites·20 claims
- 0688US7663127B2EUV debris mitigation filter and method for fabricating semiconductor dies using sameGLOBALFOUNDRIES INC·Filed 2007·Granted Feb 16, 2010·9 cites·20 claims
- 0787US9547232B2Pellicle with aerogel support frameGLOBALFOUNDRIES INC·Filed 2014·Granted Jan 17, 2017·4 cites·20 claims
- 0885US4411733ASPER Device for material workingBELL TELEPHONE LABOR INC·Filed 1982·Granted Oct 25, 1983·27 cites·12 claims
- 0982US5510230ADevice fabrication using DUV/EUV pattern delineationAT & T CORP·Filed 1994·Granted Apr 23, 1996·39 cites·7 claims
- 1081US4583539ALaser surgical systemCORNELL RES FOUNDATION INC·Filed 1982·Granted Apr 22, 1986·169 cites·25 claims
- 1179US5521031APattern delineating apparatus for use in the EUV spectrumAT & T CORP·Filed 1994·Granted May 28, 1996·34 cites·8 claims
- 1275US4388720AExternal control of recombination rate for electron-ion recombination lasersBELL TELEPHONE LABOR INC·Filed 1981·Granted Jun 14, 1983·20 cites·11 claims
- 1374US7986146B2Method and system for detecting existence of an undesirable particle during semiconductor fabricationGLOBALFOUNDRIES INC·Filed 2006·Granted Jul 26, 2011·4 cites·15 claims
- 1471US9435921B2Blazed grating spectral purity filter and methods of making such a filterGLOBALFOUNDRIES INC·Filed 2013·Granted Sep 6, 2016·2 cites·22 claims
- 1568US4369514ARecombination laserBELL TELEPHONE LABOR INC·Filed 1980·Granted Jan 18, 1983·15 cites·18 claims
- 1664US9298081B2Scattering enhanced thin absorber for EUV reticle and a method of makingGLOBALFOUNDRIES INC·Filed 2013·Granted Mar 29, 2016·1 cites·10 claims
- 1764US9195132B2Mask structures and methods of manufacturingGLOBALFOUNDRIES INC·Filed 2014·Granted Nov 24, 2015·1 cites·20 claims
- 1862US4395770ASegmented plasma excitation-recombination light sourceBELL TELEPHONE LABOR INC·Filed 1982·Granted Jul 26, 1983·13 cites·19 claims
- 1960US5498923AFluoresence imagingAT & T CORP·Filed 1994·Granted Mar 12, 1996·15 cites·14 claims
- 2057US4336506ASegmented plasma excitation-recombination laserBELL TELEPHONE LABOR INC·Filed 1979·Granted Jun 22, 1982·9 cites·11 claims
- 2153US7671348B2Hydrocarbon getter for lithographic exposure toolsADVANCED MICRO DEVICES INC·Filed 2007·Granted Mar 2, 2010·0 cites·20 claims
- 2251US4441189AFoil electrode SPER light sourceBELL TELEPHONE LABOR INC·Filed 1982·Granted Apr 3, 1984·9 cites·12 claims
- 2350US4504955ALow voltage operation of arc discharge devicesAT & T BELL LAB·Filed 1982·Granted Mar 12, 1985·6 cites·19 claims
- 2449US9275449B2Methods and systems for determining a dose-to-clear of a photoresistGLOBALFOUNDRIES INC·Filed 2013·Granted Mar 1, 2016·0 cites·20 claims
- 2547US4267525ARecombination lasers with spatial variations in pumpingBELL TELEPHONE LABOR INC·Filed 1979·Granted May 12, 1981·6 cites·18 claims
- 2645US2009135390A1Lithographic alignment marksADVANCED MICRO DEVICES INC·Filed 2007·Application pending·0 cites
- 2744US10802393B2Extreme ultraviolet (EUV) lithography maskGLOBALFOUNDRIES INC·Filed 2017·Granted Oct 13, 2020·0 cites·19 claims
- 2842US2014254001A1Fabry-perot thin absorber for euv reticle and a method of makingSUN LEI·Filed 2013·Application pending·0 cites
- 2941US2014170533A1Extreme ultraviolet lithography (euvl) alternating phase shift maskGLOBAL FOUNDRIES INC·Filed 2012·Application pending·0 cites
- 3039US10468149B2Extreme ultraviolet mirrors and masks with improved reflectivityGLOBALFOUNDRIES INC·Filed 2017·Granted Nov 5, 2019·0 cites·8 claims
- 3139US4498182AContinuous wave sper laserAT & T BELL LAB·Filed 1982·Granted Feb 5, 1985·5 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →