Inventor · disambiguated record
Oliver D. Patterson
Also filed as: PATTERSON OLIVER · PATTERSON OLIVER D · PATTERSON OLIVER DESMOND
30 granted patents·6 pending applications·1,353 citations·filing 1993–2022
98Inventor score
Top patents by PatentIndex Score
36 records- 0199US7456636B2Test structures and method of defect detection using voltage contrast inspectionIBM·Filed 2006·Granted Nov 25, 2008·95 cites·11 claims
- 0298US8350583B2Probe-able voltage contrast test structuresIBM·Filed 2009·Granted Jan 8, 2013·84 cites·5 claims
- 0398US7679083B2Semiconductor integrated test structures for electron beam inspection of semiconductor wafersSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Mar 16, 2010·105 cites·19 claims
- 0498US7518190B2Grounding front-end-of-line structures on a SOI substrateIBM·Filed 2006·Granted Apr 14, 2009·94 cites·3 claims
- 0598US7474107B2Buried short location determination using voltage contrast inspectionIBM·Filed 2006·Granted Jan 6, 2009·105 cites·5 claims
- 0697US9213060B2Probe-able voltage contrast test structuresCOTE WILLIAM J·Filed 2012·Granted Dec 15, 2015·58 cites·6 claims
- 0797US9103875B2Probe-able voltage contrast test structuresCOTE WILLIAM J·Filed 2012·Granted Aug 11, 2015·58 cites·3 claims
- 0897US9097760B2Probe-able voltage contrast test structuresCOTE WILLIAM J·Filed 2012·Granted Aug 4, 2015·57 cites·2 claims
- 0997US8927989B2Voltage contrast inspection of deep trench isolationIBM·Filed 2012·Granted Jan 6, 2015·86 cites·8 claims
- 1097US8766259B2Test structure for detection of gap in conductive layer of multilayer gate stackIBM·Filed 2013·Granted Jul 1, 2014·57 cites·12 claims
- 1197US8039837B2In-line voltage contrast detection of PFET silicide encroachmentIBM·Filed 2009·Granted Oct 18, 2011·83 cites·12 claims
- 1297US7772866B2Structure and method of mapping signal intensity to surface voltage for integrated circuit inspectionIBM·Filed 2007·Granted Aug 10, 2010·85 cites·20 claims
- 1397US7733109B2Test structure for resistive open detection using voltage contrast inspection and related methodsIBM·Filed 2007·Granted Jun 8, 2010·92 cites·29 claims
- 1496US9519210B2Voltage contrast characterization structures and methods for within chip process variation characterizationIBM·Filed 2014·Granted Dec 13, 2016·57 cites·25 claims
- 1596US8399266B2Test structure for detection of gap in conductive layer of multilayer gate stackMO RENEE T·Filed 2011·Granted Mar 19, 2013·83 cites·8 claims
- 1695US8750597B2Robust inspection alignment of semiconductor inspection tools using design informationPATTERSON OLIVER D·Filed 2011·Granted Jun 10, 2014·65 cites·16 claims
- 1785US7927895B1Varying capacitance voltage contrast structures to determine defect resistanceIBM·Filed 2009·Granted Apr 19, 2011·9 cites·16 claims
- 1883US7732866B2Grounding front-end-of-line structures on a SOI substrateIBM·Filed 2009·Granted Jun 8, 2010·9 cites·20 claims
- 1975US7547560B2Defect identification system and method for repairing killer defects in semiconductor devicesAGERE SYSTEMS INC·Filed 2006·Granted Jun 16, 2009·8 cites·22 claims
- 2073US5461559AHierarchical control system for molecular beam epitaxyUS ARMY·Filed 1993·Granted Oct 24, 1995·51 cites·18 claims
- 2170US10649026B2Apparatus for and method of net trace prior level subtractionGLOBALFOUNDRIES INC·Filed 2017·Granted May 12, 2020·2 cites·20 claims
- 2268US7397556B2Method, apparatus, and computer program product for optimizing inspection recipes using programmed defectsIBM·Filed 2006·Granted Jul 8, 2008·2 cites·6 claims
- 2367US9207279B2Inspection tool and methodology for three dimensional voltage contrast inspectionIBM·Filed 2013·Granted Dec 8, 2015·1 cites·8 claims
- 2467US8841933B2Inspection tool and methodology for three dimensional voltage contrast inspectionPATTERSON OLIVER D·Filed 2010·Granted Sep 23, 2014·2 cites·12 claims
- 2567US8787074B2Static random access memory test structurePATTERSON OLIVER D·Filed 2011·Granted Jul 22, 2014·2 cites·20 claims
- 2662US9291665B2Evaluating transistors with e-beam inspectionPATTERSON OLIVER D·Filed 2012·Granted Mar 22, 2016·1 cites·21 claims
- 2757US2024219326A1Systems, apparatus, articles of manufacture, and methods to inspect semiconductor wafersINTEL CORP·Filed 2022·Application pending·0 cites
- 2855US9293382B2Voltage contrast inspection of deep trench isolationGLOBALFOUNDRIES INC·Filed 2014·Granted Mar 22, 2016·0 cites·5 claims
- 2955US2008225284A1Method, apparatus, and computer program product for optimizing inspection recipes using programmed defectsIBM·Filed 2008·Application pending·0 cites
- 3053US9390884B2Method of inspecting a semiconductor substrateGLOBALFOUNDRIES INC·Filed 2014·Granted Jul 12, 2016·0 cites·7 claims
- 3152US2024153732A1System and method for inspection by deflector control in a charged particle systemASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3244US7074628B2Test structure and method for yield improvement of double poly bipolar deviceAGERE SYSTEMS INC·Filed 2004·Granted Jul 11, 2006·1 cites·6 claims
- 3339US2019113469A1Angled beam inspection system for semiconductor devicesGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
- 3436US2017154687A1Sram-like ebi structure design and implementation to capture mosfet source-drain leakage earilerGLOBALFOUNDRIES INC·Filed 2015·Application pending·0 cites
- 3536US2005255611A1Defect identification system and method for repairing killer defects in semiconductor devicesPATTERSON OLIVER D·Filed 2004·Application pending·0 cites
- 3630US6906538B2Alternating pulse dual-beam apparatus, methods and systems for voltage contrast behavior assessment of microcircuitsAGERE SYSTEMS INC·Filed 2003·Granted Jun 14, 2005·1 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →