Inventor · disambiguated record
Shuran Sheng
Also filed as: SHENG SHURAN
22 granted patents·25 pending applications·120 citations·filing 2006–2023
93Inventor score
Top patents by PatentIndex Score
47 records- 0196US7582515B2Multi-junction solar cells and methods and apparatuses for forming the sameAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·36 cites·23 claims
- 0288US7741144B2Plasma treatment between deposition processesAPPLIED MATERIALS INC·Filed 2008·Granted Jun 22, 2010·14 cites·15 claims
- 0387US11866821B2Substrate support cover for high-temperature corrosive environmentAPPLIED MATERIALS INC·Filed 2020·Granted Jan 9, 2024·2 cites·10 claims
- 0487US8225496B2Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminatedBACHRACH ROBERT Z·Filed 2008·Granted Jul 24, 2012·29 cites·4 claims
- 0584US8252624B2Method of manufacturing thin film solar cells having a high conversion efficiencyTANNER DAVID·Filed 2010·Granted Aug 28, 2012·11 cites·21 claims
- 0683US11094647B2Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systemsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 17, 2021·3 cites·20 claims
- 0783US10330612B2Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structuresAPPLIED MATERIALS INC·Filed 2014·Granted Jun 25, 2019·6 cites·20 claims
- 0881US11499231B2Lid stack for high frequency processingAPPLIED MATERIALS INC·Filed 2020·Granted Nov 15, 2022·1 cites·20 claims
- 0981US8203071B2Multi-junction solar cells and methods and apparatuses for forming the sameSHENG SHURAN·Filed 2008·Granted Jun 19, 2012·8 cites·17 claims
- 1080US11768984B2Parameter sensing and computer modeling for gas delivery health monitoringAPPLIED MATERIALS INC·Filed 2020·Granted Sep 26, 2023·1 cites·19 claims
- 1174US8728918B2Method and apparatus for fabricating silicon heterojunction solar cellsAPPLIED MATERIALS INC·Filed 2012·Granted May 20, 2014·3 cites·17 claims
- 1273US11846011B2Lid stack for high frequency processingAPPLIED MATERIALS INC·Filed 2022·Granted Dec 19, 2023·0 cites·15 claims
- 1372US7919398B2Microcrystalline silicon deposition for thin film solar applicationsAPPLIED MATERIALS INC·Filed 2009·Granted Apr 5, 2011·3 cites·20 claims
- 1461US2014213016A1In situ silicon surface pre-clean for high performance passivation of silicon solar cellsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1559US2024412948A1Methods and apparatus for rps-rf plasma clean and activation for advanced semiconductor packagingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1658US11837448B2High-temperature chamber and chamber component cleaning and maintenance method and apparatusAPPLIED MATERIALS INC·Filed 2021·Granted Dec 5, 2023·0 cites·22 claims
- 1758US2008264480A1Multi-junction solar cells and methods and apparatuses for forming the sameCHOI SOO-YOUNG·Filed 2008·Application pending·0 cites
- 1857US8026157B2Gas mixing method realized by back diffusion in a PECVD system with showerheadAPPLIED MATERIALS INC·Filed 2009·Granted Sep 27, 2011·1 cites·20 claims
- 1955US2010269896A1Microcrystalline silicon alloys for thin film and wafer based solar applicationsAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 2055US2013186464A1Buffer layer for improving the performance and stability of surface passivation of silicon solar cellsSHENG SHURAN·Filed 2013·Application pending·0 cites
- 2155US2011120536A1Roughness control of a wavelength selective reflector layer for thin film solar applicationsWANG DAPENG·Filed 2009·Application pending·0 cites
- 2252US11215934B2In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processingAPPLIED MATERIALS INC·Filed 2020·Granted Jan 4, 2022·0 cites·20 claims
- 2352US8895842B2High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cellsSHENG SHURAN·Filed 2009·Granted Nov 25, 2014·0 cites·15 claims
- 2452US2009130827A1Intrinsic amorphous silicon layerCHOI SOO YOUNG·Filed 2008·Application pending·0 cites
- 2552US2013199606A1Methods of manufacturing back surface field and metallized contacts on a solar cell deviceSHENG SHURAN·Filed 2012·Application pending·0 cites
- 2651US12013291B2Advanced temperature monitoring system with expandable modular layout designAPPLIED MATERIALS INC·Filed 2020·Granted Jun 18, 2024·0 cites·22 claims
- 2751US2009104733A1Microcrystalline silicon deposition for thin film solar applicationsCHAE YONG KEE·Filed 2007·Application pending·0 cites
- 2851US2010059110A1Microcrystalline silicon alloys for thin film and wafer based solar applicationsAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 2950US11532464B2Reactor design for large-area VHF plasma processing with improved uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Dec 20, 2022·0 cites·23 claims
- 3048US2008173350A1Multi-junction solar cells and methods and apparatuses for forming the sameAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3148US2011088760A1Methods of forming an amorphous silicon layer for thin film solar cell applicationAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3248US2008223440A1Multi-junction solar cells and methods and apparatuses for forming the sameSHENG SHURAN·Filed 2008·Application pending·0 cites
- 3348US2011232753A1Methods of forming a thin-film solar energy deviceAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 3448US2012107996A1Surface treatment process performed on a transparent conductive oxide layer for solar cell applicationsSHENG SHURAN·Filed 2010·Application pending·0 cites
- 3548US2008153280A1Reactive sputter deposition of a transparent conductive filmAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 3647US2008289686A1Method and apparatus for depositing a silicon layer on a transmitting conductive oxide layer suitable for use in solar cell applicationsWON TAE KYUNG·Filed 2007·Application pending·0 cites
- 3747US2010047954A1Photovoltaic production lineSU TZAY-FA JEFF·Filed 2009·Application pending·0 cites
- 3847US2010258169A1Pulsed plasma deposition for forming microcrystalline silicon layer for solar applicationsAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3946US7964430B2Silicon layer on a laser transparent conductive oxide layer suitable for use in solar cell applicationsAPPLIED MATERIALS INC·Filed 2007·Granted Jun 21, 2011·2 cites·16 claims
- 4046US2023378006A1In-situ integrated wafer parameter detection systemAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4145US2008245414A1Methods for forming a photovoltaic device with low contact resistanceSHENG SHURAN·Filed 2007·Application pending·0 cites
- 4242US10047440B2Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devicesAPPLIED MATERIALS INC·Filed 2016·Granted Aug 14, 2018·0 cites·12 claims
- 4341US2021280389A1Large-area vhf pecvd chamber for low-damage and high-throughput plasma processingAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4441US2019249306A1Apparatus and methods for reducing cross-contamination in cvd systemsAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4539US10453728B2Exchange and flip chamber design for heterojunction solar cell formationAPPLIED MATERIALS INC·Filed 2017·Granted Oct 22, 2019·0 cites·16 claims
- 4636US2011263074A1Apparatus and methods for reducing light induced damage in thin film solar cellsAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4733US2015333213A1Diamond-like carbon coatings for substrate carriersAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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