Inventor · disambiguated record
Hideaki Yakushiji
Also filed as: YAKUSHIJI HIDEAKI
4 granted patents·5 pending applications·2 citations·filing 2008–2025
57Inventor score
Top patents by PatentIndex Score
9 records- 0168US9984907B2Evacuation method and vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 29, 2018·2 cites·7 claims
- 0254US2022389584A1Shower head, electrode unit, gas supply unit, substrate processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0352US2024212987A1Gas supply system, gas control system, plasma processing apparatus, and gas control methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0450US2025191887A1Method for manufacturing componment and componentTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0548US8243265B2Method and apparatus for detecting foreign materials and storage mediumMORIYA TSUYOSHI·Filed 2009·Granted Aug 14, 2012·0 cites·9 claims
- 0647US2015170891A1Particle backflow preventing part and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0745US8516715B2Evacuation method and storage mediumYAMAWAKU JUN·Filed 2008·Granted Aug 27, 2013·0 cites·15 claims
- 0834US10192719B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Jan 29, 2019·0 cites·8 claims
- 0929US2015243489A1Cleaning method for plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →