Assignee
YAMAWAKU JUN
JP·14 granted patents·3 pending applications·41 citations·filing 2008–2012
Top patents by PatentIndex Score
17 records- 0189US9349618B2Substrate processing apparatusYAMAWAKU JUN·Filed 2012·Granted May 24, 2016·10 cites·4 claims
- 0287US8257498B2Substrate transfer module and substrate processing systemYAMAWAKU JUN·Filed 2008·Granted Sep 4, 2012·12 cites·18 claims
- 0383US9385015B2Transfer chamber and method for preventing adhesion of particleYAMAWAKU JUN·Filed 2010·Granted Jul 5, 2016·6 cites·4 claims
- 0476US8398745B2Substrate processing apparatus and exhaust method thereforYAMAWAKU JUN·Filed 2010·Granted Mar 19, 2013·4 cites·12 claims
- 0575US9236226B2Plasma processing apparatusYAMAWAKU JUN·Filed 2012·Granted Jan 12, 2016·3 cites·15 claims
- 0674US8824875B2Method for heating part in processing chamber of semiconductor manufacturing apparatus and semiconductor manufacturing apparatusYAMAWAKU JUN·Filed 2011·Granted Sep 2, 2014·3 cites·5 claims
- 0766US8523428B2Component in processing chamber of substrate processing apparatus and method of measuring temperature of the componentYAMAWAKU JUN·Filed 2012·Granted Sep 3, 2013·1 cites·14 claims
- 0862US8845853B2Substrate processing apparatus and substrate processing methodYAMAWAKU JUN·Filed 2008·Granted Sep 30, 2014·1 cites·11 claims
- 0961US8409328B2Substrate transfer device and substrate transfer methodYAMAWAKU JUN·Filed 2010·Granted Apr 2, 2013·1 cites·18 claims
- 1053US2012176692A1Focus ring and substrate processing apparatus having sameYAMAWAKU JUN·Filed 2012·Application pending·0 cites
- 1148US8777483B2Temperature measuring apparatus and temperature measuring methodYAMAWAKU JUN·Filed 2011·Granted Jul 15, 2014·0 cites·21 claims
- 1245US8516715B2Evacuation method and storage mediumYAMAWAKU JUN·Filed 2008·Granted Aug 27, 2013·0 cites·15 claims
- 1342US2012247954A1Plasma processing apparatusYAMAWAKU JUN·Filed 2012·Application pending·0 cites
- 1442US2012062870A1Physical state measuring apparatus and physical state measuring methodYAMAWAKU JUN·Filed 2011·Application pending·0 cites
- 1541US8964350B2Substrate removing method and storage mediumYAMAWAKU JUN·Filed 2012·Granted Feb 24, 2015·0 cites·5 claims
- 1641US8593780B2Substrate removing method and storage mediumYAMAWAKU JUN·Filed 2012·Granted Nov 26, 2013·0 cites·5 claims
- 1740US9019505B2Temperature control system including sub-chillerYAMAWAKU JUN·Filed 2011·Granted Apr 28, 2015·0 cites·4 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →