Assignee
MORIYA TSUYOSHI
JP·27 granted patents·4 pending applications·98 citations·filing 2002–2012
Top patents by PatentIndex Score
31 records- 0196US8236109B2Component cleaning method and storage mediumMORIYA TSUYOSHI·Filed 2009·Granted Aug 7, 2012·43 cites·12 claims
- 0289US8337629B2Method for cleaning elements in vacuum chamber and apparatus for processing substratesMORIYA TSUYOSHI·Filed 2012·Granted Dec 25, 2012·7 cites·19 claims
- 0388US8152907B2Gas purification apparatus and methodMORIYA TSUYOSHI·Filed 2008·Granted Apr 10, 2012·10 cites·7 claims
- 0476US8058186B2Components for substrate processing apparatus and manufacturing method thereofMORIYA TSUYOSHI·Filed 2005·Granted Nov 15, 2011·5 cites·4 claims
- 0573US9022225B2Filtration filter and production method thereforMORIYA TSUYOSHI·Filed 2012·Granted May 5, 2015·2 cites·21 claims
- 0671US8218145B2Particle monitor system and substrate processing apparatusMORIYA TSUYOSHI·Filed 2011·Granted Jul 10, 2012·1 cites·16 claims
- 0770US8206513B2Method for cleaning elements in vacuum chamber and apparatus for processing substratesMORIYA TSUYOSHI·Filed 2008·Granted Jun 26, 2012·2 cites·13 claims
- 0869US8210742B2Method and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage mediumMORIYA TSUYOSHI·Filed 2009·Granted Jul 3, 2012·2 cites·5 claims
- 0968US8419963B2Polishing methodMORIYA TSUYOSHI·Filed 2011·Granted Apr 16, 2013·1 cites·7 claims
- 1068US8231800B2Plasma processing apparatus and methodMORIYA TSUYOSHI·Filed 2009·Granted Jul 31, 2012·1 cites·19 claims
- 1167US8404050B2Plasma processing apparatus and methodMORIYA TSUYOSHI·Filed 2012·Granted Mar 26, 2013·1 cites·19 claims
- 1265US8137473B2Method for cleaning elements in vacuum chamber and apparatus for processing substratesMORIYA TSUYOSHI·Filed 2004·Granted Mar 20, 2012·7 cites·12 claims
- 1362US8132580B2Substrate processing system and substrate cleaning apparatus including a jetting apparatusMORIYA TSUYOSHI·Filed 2008·Granted Mar 13, 2012·1 cites·20 claims
- 1461US8608422B2Particle sticking prevention apparatus and plasma processing apparatusMORIYA TSUYOSHI·Filed 2004·Granted Dec 17, 2013·7 cites·24 claims
- 1560US8727708B2Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing componentMORIYA TSUYOSHI·Filed 2011·Granted May 20, 2014·1 cites·20 claims
- 1658US8202394B2Method of manufacturing semiconductor devices and semiconductor manufacturing apparatusMORIYA TSUYOSHI·Filed 2002·Granted Jun 19, 2012·6 cites·13 claims
- 1757US8389053B2Method of cleaning powdery source supply system, storage medium, substrate processing system and substrate processing methodMORIYA TSUYOSHI·Filed 2008·Granted Mar 5, 2013·0 cites·12 claims
- 1855US8323414B2Particle removal apparatus and method and plasma processing apparatusMORIYA TSUYOSHI·Filed 2011·Granted Dec 4, 2012·0 cites·14 claims
- 1954US8475562B2Gas purification apparatus and methodMORIYA TSUYOSHI·Filed 2012·Granted Jul 2, 2013·0 cites·8 claims
- 2051US8854625B2Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoringMORIYA TSUYOSHI·Filed 2011·Granted Oct 7, 2014·0 cites·22 claims
- 2151US8821607B2Particle capture unit, method for manufacturing the same, and substrate processing apparatusMORIYA TSUYOSHI·Filed 2012·Granted Sep 2, 2014·1 cites·17 claims
- 2249US8260557B2System and method for detecting particle generation source, and storage medium thereforMORIYA TSUYOSHI·Filed 2009·Granted Sep 4, 2012·0 cites·8 claims
- 2348US8243265B2Method and apparatus for detecting foreign materials and storage mediumMORIYA TSUYOSHI·Filed 2009·Granted Aug 14, 2012·0 cites·9 claims
- 2448US2013193087A1Water treatment device and water treatment methodMORIYA TSUYOSHI·Filed 2011·Application pending·0 cites
- 2546US8113757B2Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamberMORIYA TSUYOSHI·Filed 2007·Granted Feb 14, 2012·0 cites·13 claims
- 2644US2012154625A1Image processing apparatus, image processing method, and program recording mediumMORIYA TSUYOSHI·Filed 2011·Application pending·0 cites
- 2741US9627184B2Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the programMORIYA TSUYOSHI·Filed 2010·Granted Apr 18, 2017·0 cites·5 claims
- 2839US8498911B2Particle generation factor determining system, charging method and storage mediumMORIYA TSUYOSHI·Filed 2010·Granted Jul 30, 2013·0 cites·9 claims
- 2939US2012325349A1Substrate accommodation deviceMORIYA TSUYOSHI·Filed 2011·Application pending·0 cites
- 3038US8751196B2Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatusMORIYA TSUYOSHI·Filed 2010·Granted Jun 10, 2014·0 cites·15 claims
- 3136US2012055506A1Substrate cleaning methodMORIYA TSUYOSHI·Filed 2010·Application pending·0 cites
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