Inventor · disambiguated record
Eigo Kawakami
Also filed as: KAWAKAMI EIGO
46 granted patents·4 pending applications·1,071 citations·filing 1984–2013
98Inventor score
Top patents by PatentIndex Score
50 records- 0195US4985186AProcess for producing optical elementCANON KK·Filed 1987·Granted Jan 15, 1991·102 cites·15 claims
- 0294US7180575B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Feb 20, 2007·20 cites·9 claims
- 0394US4780739AAnti-vibration imaging deviceCANON KK·Filed 1986·Granted Oct 25, 1988·105 cites·20 claims
- 0493US4802746AVariable-focus optical element and focus detecting device utilizing the sameCANON KK·Filed 1986·Granted Feb 7, 1989·87 cites·21 claims
- 0591US8734701B2Imprint apparatus and method of manufacturing articleKAWAKAMI EIGO·Filed 2010·Granted May 27, 2014·11 cites·17 claims
- 0691US7815424B2Imprinting machine and device manufacturing methodCANON KK·Filed 2005·Granted Oct 19, 2010·20 cites·5 claims
- 0791US7381272B2Processing apparatusCANON KK·Filed 2005·Granted Jun 3, 2008·14 cites·10 claims
- 0891US5072116AMicroprobe preparation thereof and electronic device by use of said microprobeCANON KK·Filed 1990·Granted Dec 10, 1991·93 cites·68 claims
- 0990US8834144B2Imprinting machine and device manufacturing methodNAKAMURA TAKASHI·Filed 2010·Granted Sep 16, 2014·9 cites·13 claims
- 1089US4640592AOptical display utilizing thermally formed bubble in a liquid core waveguideCANON KK·Filed 1984·Granted Feb 3, 1987·58 cites·9 claims
- 1188US4788596AImage stabilizing deviceCANON KK·Filed 1986·Granted Nov 29, 1988·57 cites·6 claims
- 1287US5721721ATwo scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording mediumCANON KK·Filed 1996·Granted Feb 24, 1998·120 cites·17 claims
- 1386US8226392B2Transfer apparatus and method of manufacturing deviceKAWAKAMI EIGO·Filed 2009·Granted Jul 24, 2012·10 cites·3 claims
- 1486US7807065B2Processing methodCANON KK·Filed 2006·Granted Oct 5, 2010·8 cites·2 claims
- 1586US7789647B2Processing apparatus and methodCANON KK·Filed 2005·Granted Sep 7, 2010·9 cites·8 claims
- 1686US5157700AExposure apparatus for controlling intensity of exposure radiationCANON KK·Filed 1989·Granted Oct 20, 1992·41 cites·47 claims
- 1784US9039402B2Imprinting apparatus and method thereforKAWAKAMI EIGO·Filed 2009·Granted May 26, 2015·7 cites·7 claims
- 1884US7815425B2Processing apparatusCANON KK·Filed 2005·Granted Oct 19, 2010·8 cites·2 claims
- 1984US5519686AEncoder for controlling measurements in the range of a few angstromsCANON KK·Filed 1995·Granted May 21, 1996·69 cites·34 claims
- 2082US7785091B2Processing apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Aug 31, 2010·6 cites·10 claims
- 2179US7690912B2Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the sameCANON KK·Filed 2006·Granted Apr 6, 2010·5 cites·15 claims
- 2278US7846346B1Processing apparatus and methodCANON KK·Filed 2006·Granted Dec 7, 2010·4 cites·11 claims
- 2378US7233383B2Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deteriorationCANON KK·Filed 2005·Granted Jun 19, 2007·5 cites·6 claims
- 2477US7196321B2Fine pattern forming apparatus and fine pattern inspecting apparatusCANON KK·Filed 2005·Granted Mar 27, 2007·6 cites·17 claims
- 2577US4685766AOptical deviceCANON KK·Filed 1984·Granted Aug 11, 1987·31 cites·10 claims
- 2676US8414279B2Imprint apparatus and article manufacturing methodKAWAKAMI EIGO·Filed 2009·Granted Apr 9, 2013·5 cites·6 claims
- 2776US8404169B2Imprint apparatus and method of manufacturing articleKAWAKAMI EIGO·Filed 2009·Granted Mar 26, 2013·4 cites·6 claims
- 2876US4667316AInformation recording-reproducing apparatusCANON KK·Filed 1984·Granted May 19, 1987·18 cites·13 claims
- 2974US8616874B2Pattern transferring apparatus and pattern transferring methodKASUMI KAZUYUKI·Filed 2006·Granted Dec 31, 2013·4 cites·6 claims
- 3073US5994698AMicroprobe, preparation thereof and electronic device by use of said microprobeCANON KK·Filed 1994·Granted Nov 30, 1999·34 cites·50 claims
- 3171US8770964B2Imprint apparatus and article manufacturing methodKAWAKAMI EIGO·Filed 2011·Granted Jul 8, 2014·3 cites·7 claims
- 3271US7719659B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Granted May 18, 2010·2 cites·5 claims
- 3370US7382434B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Jun 3, 2008·2 cites·1 claims
- 3468US7236231B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Jun 26, 2007·2 cites·16 claims
- 3568US5008703AExposure apparatus and control of the sameCANON KK·Filed 1989·Granted Apr 16, 1991·18 cites·9 claims
- 3666US5255258AMicroprobe, preparation thereof and electronic device by use of said microprobeCANON KK·Filed 1991·Granted Oct 19, 1993·22 cites·20 claims
- 3761US6990173B1Positioning apparatus, atmosphere substituting method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Jan 24, 2006·6 cites·23 claims
- 3857US9188854B2Transfer apparatus and method of manufacturing deviceKAWAKAMI EIGO·Filed 2011·Granted Nov 17, 2015·0 cites·5 claims
- 3957US2014151936A1Pattern transferring apparatus and pattern transferring methodCANON KK·Filed 2013·Application pending·0 cites
- 4056US8393885B2Processing apparatusKASUMI KAZUYUKI·Filed 2008·Granted Mar 12, 2013·0 cites·6 claims
- 4156US5443932AExposure methodCANON KK·Filed 1993·Granted Aug 22, 1995·13 cites·5 claims
- 4249US2010078840A1Imprint apparatus and method of manufacturing articleCANON KK·Filed 2009·Application pending·0 cites
- 4349US2010072667A1Imprinting methodCANON KK·Filed 2009·Application pending·0 cites
- 4447US5226523AConveying apparatus and method of controlling the sameCANON KK·Filed 1992·Granted Jul 13, 1993·8 cites·10 claims
- 4544US5482002AMicroprobe, preparation thereof and electronic device by use of said microprobeCANON KK·Filed 1993·Granted Jan 9, 1996·7 cites·4 claims
- 4640US7649184B2Processing method and systemCANON KK·Filed 2004·Granted Jan 19, 2010·0 cites·14 claims
- 4740US2005248659A1Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance methodKASUMI KAZUYUKI·Filed 2005·Application pending·0 cites
- 4838US5641264ASubstrate conveying device and method of controlling the sameCANON KK·Filed 1992·Granted Jun 24, 1997·9 cites·11 claims
- 4936US4971455ASliderCANON KK·Filed 1990·Granted Nov 20, 1990·6 cites·4 claims
- 5035US5276725AExposure systemCANON KK·Filed 1992·Granted Jan 4, 1994·3 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →