Inventor · disambiguated record
Ryoichi Aoyama
Also filed as: AOYAMA RYOICHI
4 granted patents·2 pending applications·14 citations·filing 2003–2010
67Inventor score
Top patents by PatentIndex Score
6 records- 0169US6980278B2Self-cleaning method for semiconductor exposure apparatusOKI ELECTRIC IND CO LTD·Filed 2003·Granted Dec 27, 2005·11 cites·16 claims
- 0255US7733460B2Aligner and self-cleaning method for alignerOKI SEMICONDUCTOR CO LTD·Filed 2005·Granted Jun 8, 2010·0 cites·14 claims
- 0355US7485975B2Alignment error measuring mark and method for manufacturing semiconductor device using the sameOKI ELECTRIC IND CO LTD·Filed 2006·Granted Feb 3, 2009·2 cites·7 claims
- 0452US2010208220A1Aligner and self-cleaning method for alignerOKI SEMICONDUCTOR CO LTD·Filed 2010·Application pending·0 cites
- 0550US8198015B2Method of forming mask patternAOYAMA RYOICHI·Filed 2009·Granted Jun 12, 2012·1 cites·20 claims
- 0642US2009269681A1Method of detecting exposure boundary position, and method of fabricating semiconductor deviceOKI SEMICONDUCTOR CO LTD·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →