Aligner and self-cleaning method for aligner

Abstract

When a self-cleaning method for an aligner is carried out, a reflecting plate having a convex lens portion is set in an original plate holder, and exposure light rays are irradiated from a light source. The surface of the lens portion is coated with a reflective film. The light rays are reflected by the reflecting plate, diffused, and emitted onto the surface of a condenser lens, thereby breaking down and removing contaminants that are adhered to the surface of the condenser lens. The light rays also enter the interior of the condenser lens to clean away contaminants that are adhered to locations other than a normal exposure path. When a concave mirror and/or a reflecting plate having 50% transmittance is used as the reflecting plate, the emission range of the light rays (i.e., the locations that are cleaned) can be changed.

1 - 5 . (canceled) 
   
   
       6 . A self-cleaning method for an aligner, the aligner including a light source for outputting exposure light rays, an optical system for guiding said light rays from said light source to an exposure mask formed with an exposure pattern, and a projection lens for projecting said exposure pattern onto an object to be treated, said self-cleaning method comprising:
 disposing a reflecting plate in a position in which said object is normally disposed, for reflecting light emitted from said projection lens; and   cleaning said projection lens and said optical system by irradiating said projection lens with said light rays reflected by said reflecting plate.   
   
   
       7 . The self-cleaning method for an aligner according to  claim 6 , wherein said reflecting plate is a convex mirror or a concave mirror. 
   
   
       8 - 18 . (canceled) 
   
   
       19 . An aligner comprising:
 a light source for outputting exposure light rays;   an optical system for guiding said light rays from said light source to an exposure mask formed with an exposure pattern;   a projection lens for projecting said exposure pattern onto an object to be treated; and   a reflecting plate having a convex surface or a concave surface, disposed in a position in which said object is normally disposed, for reflecting said light rays emitted from said projection lens toward said projection lens in order to clean said projection lens and said optical system by said light rays.   
   
   
       20 . The aligner according to  claim 19 , wherein said light source emits ArF Excimer light with a wavelength of 193 nm or F2 light with a wavelength of 157 nm.