Inventor · disambiguated record
Wiebe B. Deboer
Also filed as: DEBOER WIEBE B
15 granted patents·2,619 citations·filing 1985–1995
96Inventor score
Top patents by PatentIndex Score
15 records- 0198US5374315ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentADVANCED SEMICONDUCTOR MAT·Filed 1993·Granted Dec 20, 1994·506 cites·27 claims
- 0298US4828224AChemical vapor deposition systemEPSILON TECHN INC·Filed 1987·Granted May 9, 1989·557 cites·2 claims
- 0397US5198034ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentEPSILON TECHN INC·Filed 1991·Granted Mar 30, 1993·279 cites·16 claims
- 0497US4821674ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentDEBOER WIEBE B·Filed 1987·Granted Apr 18, 1989·649 cites·31 claims
- 0594US4789771AMethod and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatusEPSILON LP·Filed 1987·Granted Dec 6, 1988·110 cites·20 claims
- 0690US5092728ASubstrate loading apparatus for a CVD processEPSILON TECHN INC·Filed 1989·Granted Mar 3, 1992·51 cites·7 claims
- 0789US4798165AApparatus for chemical vapor deposition using an axially symmetric gas flowEPSILON·Filed 1988·Granted Jan 17, 1989·87 cites·11 claims
- 0887US5435682AChemical vapor desposition systemADVANCED SEMICONDUCTOR MAT·Filed 1994·Granted Jul 25, 1995·74 cites·10 claims
- 0987US4654509AMethod and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatusEPSILON LTD PARTNERSHIP·Filed 1985·Granted Mar 31, 1987·58 cites·4 claims
- 1085US5902407ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentFiled 1995·Granted May 11, 1999·61 cites·11 claims
- 1182US5427620ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentADVANCED SEMICONDUCTOR MAT·Filed 1992·Granted Jun 27, 1995·59 cites·32 claims
- 1271US5117769ADrive shaft apparatus for a susceptorEPSILON TECHN INC·Filed 1990·Granted Jun 2, 1992·53 cites·13 claims
- 1370US4996942ARotatable substrate supporting susceptor with temperature sensorsEPSILON TECHN INC·Filed 1989·Granted Mar 5, 1991·36 cites·56 claims
- 1458US5318634ASubstrate supporting apparatusEPSILON TECHN INC·Filed 1991·Granted Jun 7, 1994·26 cites·14 claims
- 1545US4993355ASusceptor with temperature sensing deviceEPSILON TECHN INC·Filed 1989·Granted Feb 19, 1991·13 cites·6 claims
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