Assignee
ADVANCED SEMICONDUCTOR MAT
US·32 granted patents·3,842 citations·filing 1978–1998
Top patents by PatentIndex Score
32 records- 0198US5997588ASemiconductor processing system with gas curtainADVANCED SEMICONDUCTOR MAT·Filed 1996·Granted Dec 7, 1999·664 cites·40 claims
- 0298US5374315ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentADVANCED SEMICONDUCTOR MAT·Filed 1993·Granted Dec 20, 1994·506 cites·27 claims
- 0398US4401507AMethod and apparatus for achieving spatially uniform externally excited non-thermal chemical reactionsADVANCED SEMICONDUCTOR MAT·Filed 1982·Granted Aug 30, 1983·557 cites·9 claims
- 0496US4987856AHigh throughput multi station processor for multiple single wafersADVANCED SEMICONDUCTOR MAT·Filed 1989·Granted Jan 29, 1991·706 cites·27 claims
- 0595US4557943AMetal-silicide deposition using plasma-enhanced chemical vapor depositionADVANCED SEMICONDUCTOR MAT·Filed 1983·Granted Dec 10, 1985·98 cites·4 claims
- 0695US4183545ARotary vacuum-chuck using no rotary unionADVANCED SEMICONDUCTOR MAT·Filed 1978·Granted Jan 15, 1980·67 cites·2 claims
- 0793US6225602B1Vertical furnace for the treatment of semiconductor substratesADVANCED SEMICONDUCTOR MAT·Filed 1998·Granted May 1, 2001·398 cites·12 claims
- 0892US4451197AObject detection apparatus and methodADVANCED SEMICONDUCTOR MAT·Filed 1982·Granted May 29, 1984·83 cites·4 claims
- 0989US5525157AGas injectors for reaction chambers in CVD systemsADVANCED SEMICONDUCTOR MAT·Filed 1995·Granted Jun 11, 1996·48 cites·7 claims
- 1089US5324155AWafer handling system with bernoulli pick-upADVANCED SEMICONDUCTOR MAT·Filed 1992·Granted Jun 28, 1994·105 cites·15 claims
- 1188US5411590AGas injectors for reaction chambers in CVD systemsADVANCED SEMICONDUCTOR MAT·Filed 1991·Granted May 2, 1995·47 cites·14 claims
- 1287US5435682AChemical vapor desposition systemADVANCED SEMICONDUCTOR MAT·Filed 1994·Granted Jul 25, 1995·74 cites·10 claims
- 1384US4519246AImproved flow meterADVANCED SEMICONDUCTOR MAT·Filed 1981·Granted May 28, 1985·51 cites·17 claims
- 1482US5427620ARotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipmentADVANCED SEMICONDUCTOR MAT·Filed 1992·Granted Jun 27, 1995·59 cites·32 claims
- 1580US5458918AGas injectors for reaction chambers in CVD systemsADVANCED SEMICONDUCTOR MAT·Filed 1993·Granted Oct 17, 1995·30 cites·11 claims
- 1679US4402613ASurface inspection systemADVANCED SEMICONDUCTOR MAT·Filed 1979·Granted Sep 6, 1983·39 cites·5 claims
- 1777US5244694AApparatus for improving the reactant gas flow in a reaction chamberADVANCED SEMICONDUCTOR MAT·Filed 1991·Granted Sep 14, 1993·29 cites·4 claims
- 1877US4491606ASpacer for preventing shorting between conductive platesADVANCED SEMICONDUCTOR MAT·Filed 1983·Granted Jan 1, 1985·19 cites·9 claims
- 1977US4450718AFlow meter including improved laminar flow restrictor device thereforADVANCED SEMICONDUCTOR MAT·Filed 1982·Granted May 29, 1984·36 cites·10 claims
- 2073US4633051AStable conductive elements for direct exposure to reactive environmentsADVANCED SEMICONDUCTOR MAT·Filed 1983·Granted Dec 30, 1986·17 cites·13 claims
- 2168US5091217AMethod for processing wafers in a multi station common chamber reactorADVANCED SEMICONDUCTOR MAT·Filed 1990·Granted Feb 25, 1992·51 cites·29 claims
- 2263US5573566AMethod of making a quartz dome reactor chamberADVANCED SEMICONDUCTOR MAT·Filed 1995·Granted Nov 12, 1996·23 cites·20 claims
- 2357US4669599AApparatus and method for handling a workpieceADVANCED SEMICONDUCTOR MAT·Filed 1985·Granted Jun 2, 1987·19 cites·14 claims
- 2457US4401687APlasma deposition of siliconADVANCED SEMICONDUCTOR MAT·Filed 1981·Granted Aug 30, 1983·13 cites·11 claims
- 2556US4557657AArticle handling apparatus and methodADVANCED SEMICONDUCTOR MAT·Filed 1983·Granted Dec 10, 1985·25 cites·73 claims
- 2653US4610748AApparatus for processing semiconductor wafers or the likeADVANCED SEMICONDUCTOR MAT·Filed 1984·Granted Sep 9, 1986·17 cites·4 claims
- 2752US4364707AObject transport apparatusADVANCED SEMICONDUCTOR MAT·Filed 1980·Granted Dec 21, 1982·23 cites·10 claims
- 2852US4204155AAutomatic four-point probeADVANCED SEMICONDUCTOR MAT·Filed 1978·Granted May 20, 1980·12 cites·1 claims
- 2932US4414498AStepping motor drive circuitADVANCED SEMICONDUCTOR MAT·Filed 1981·Granted Nov 8, 1983·9 cites·22 claims
- 3031US5175021ATransmission line for providing power to an electrode boat in a plasma enhanced chemical vapor deposition systemADVANCED SEMICONDUCTOR MAT·Filed 1990·Granted Dec 29, 1992·9 cites·13 claims
- 3128US4520313ASemiconductor testing and apparatus thereforADVANCED SEMICONDUCTOR MAT·Filed 1982·Granted May 28, 1985·4 cites·9 claims
- 3227US4746856ASemiconductor testing and apparatus thereforADVANCED SEMICONDUCTOR MAT·Filed 1985·Granted May 24, 1988·4 cites·8 claims
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