Inventor · disambiguated record
Arul Chakkaravarthi Arjunan
Also filed as: ARJUNAN ARUL · ARJUNAN ARUL C · ARJUNAN ARUL CHAKKARAVARTHI
11 granted patents·4 pending applications·38 citations·filing 2009–2022
87Inventor score
Top patents by PatentIndex Score
15 records- 0189US9259819B2CMP method for forming smooth diamond surfacesSINMAT INC·Filed 2014·Granted Feb 16, 2016·8 cites·12 claims
- 0288US9259818B2Smooth diamond surfaces and CMP method for formingSINMAT INC·Filed 2012·Granted Feb 16, 2016·8 cites·8 claims
- 0388US9218954B2Defect capping method for reduced defect density epitaxial articlesSINMAT INC·Filed 2013·Granted Dec 22, 2015·8 cites·14 claims
- 0478US8557133B2Chemical mechanical polishing of silicon carbide comprising surfacesSINGH RAJIV K·Filed 2011·Granted Oct 15, 2013·4 cites·15 claims
- 0575US9567492B2Polishing of hard substrates with soft-core composite particlesSINMAT INC·Filed 2014·Granted Feb 14, 2017·3 cites·13 claims
- 0673US9551075B2Chemical mechanical polishing of aluminaSINMAT INC·Filed 2014·Granted Jan 24, 2017·2 cites·5 claims
- 0769US11820918B2Hard abrasive particle-free polishing of hard materialsENTEGRIS INC·Filed 2021·Granted Nov 21, 2023·0 cites·9 claims
- 0869US9368367B2Chemical mechanical polishing of silicon carbide comprising surfacesSINGH RAJIV K·Filed 2009·Granted Jun 14, 2016·3 cites·7 claims
- 0966US8828874B2Chemical mechanical polishing of group III-nitride surfacesSINGH RAJIV K·Filed 2011·Granted Sep 9, 2014·2 cites·15 claims
- 1059US9878420B2Method of chemical mechanical polishing of aluminaSINMAT INC·Filed 2016·Granted Jan 30, 2018·0 cites·11 claims
- 1157US2020102479A1Hard abrasive particle-free polishing of hard materials methodSINMAT INC·Filed 2019·Application pending·0 cites
- 1256US11078380B2Hard abrasive particle-free polishing of hard materialsENTEGRIS INC·Filed 2017·Granted Aug 3, 2021·0 cites·6 claims
- 1352US2023200245A1Hybrid chemical and physical vapor deposition of transition-metal-alloyed piezoelectric semiconductor filmsUNIV HOUSTON SYSTEM·Filed 2022·Application pending·0 cites
- 1445US2011221039A1Defect capping for reduced defect density epitaxial articlesSINMAT INC·Filed 2010·Application pending·0 cites
- 1536US2010260977A1Chemical mechanical fabrication (cmf) for forming tilted surface featuresSINMAT INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →