Inventor · disambiguated record
Kiyoshi Arakawa
Also filed as: ARAKAWA KIYOSHI
7 granted patents·1 pending application·120 citations·filing 1999–2007
87Inventor score
Files withCANON KK8
Top patents by PatentIndex Score
8 records- 0191US6757048B2Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factoryCANON KK·Filed 2001·Granted Jun 29, 2004·58 cites·27 claims
- 0275US7034918B2Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factoryCANON KK·Filed 2005·Granted Apr 25, 2006·4 cites·6 claims
- 0374US7186285B2Chemical filter arrangement for a semiconductor manufacturing apparatusCANON KK·Filed 2005·Granted Mar 6, 2007·4 cites·4 claims
- 0473US7057701B2Exposure apparatusCANON KK·Filed 2004·Granted Jun 6, 2006·15 cites·16 claims
- 0569US6924877B2Chemical filter arrangement for a semiconductor manufacturing apparatusCANON KK·Filed 2002·Granted Aug 2, 2005·11 cites·5 claims
- 0667US6891593B2Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factoryCANON KK·Filed 2003·Granted May 10, 2005·9 cites·2 claims
- 0753US6356338B2Semiconductor production system with an in-line subsystemCANON KK·Filed 1999·Granted Mar 12, 2002·19 cites·12 claims
- 0853US2007119131A1Chemical filter arrangement for asemiconductor manufacturing apparatusCANON KK·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →