Inventor · disambiguated record
Surinder Bedi
Also filed as: BEDI SURINDER · BEDI SURINDER S
14 granted patents·3 pending applications·1,042 citations·filing 1996–2010
95Inventor score
Technology areasH10P
Top patents by PatentIndex Score
17 records- 0197US6310755B1Electrostatic chuck having gas cavity and methodAPPLIED MATERIALS INC·Filed 1999·Granted Oct 30, 2001·325 cites·38 claims
- 0296US6538872B1Electrostatic chuck having heater and methodAPPLIED MATERIALS INC·Filed 2001·Granted Mar 25, 2003·123 cites·18 claims
- 0394US6490146B2Electrostatic chuck bonded to base with a bond layer and methodAPPLIED MATERIALS INC·Filed 2001·Granted Dec 3, 2002·88 cites·28 claims
- 0489US7582167B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2007·Granted Sep 1, 2009·15 cites·5 claims
- 0588US6094334APolymer chuck with heater and method of manufactureAPPLIED MATERIALS INC·Filed 1999·Granted Jul 25, 2000·97 cites·58 claims
- 0687US6055150AMulti-electrode electrostatic chuck having fuses in hollow cavitiesAPPLIED MATERIALS INC·Filed 1998·Granted Apr 25, 2000·101 cites·32 claims
- 0783US6462928B1Electrostatic chuck having improved electrical connector and methodAPPLIED MATERIALS INC·Filed 1999·Granted Oct 8, 2002·65 cites·13 claims
- 0882US5729423APuncture resistant electrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Mar 17, 1998·57 cites·45 claims
- 0981US6490144B1Support for supporting a substrate in a process chamberAPPLIED MATERIALS INC·Filed 1999·Granted Dec 3, 2002·57 cites·65 claims
- 1079US7107125B2Method and apparatus for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2003·Granted Sep 12, 2006·19 cites·19 claims
- 1177US5986875APuncture resistant electrostatic chuckAPPLIED MATERIALS INC·Filed 1998·Granted Nov 16, 1999·42 cites·32 claims
- 1276US6278600B1Electrostatic chuck with improved temperature control and puncture resistanceAPPLIED MATERIALS INC·Filed 1999·Granted Aug 21, 2001·46 cites·13 claims
- 1362US7279049B2Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate supportAPPLIED MATERIALS INC·Filed 2004·Granted Oct 9, 2007·7 cites·13 claims
- 1448US2006224276A1Method for monitoring the position of a semiconductor processing robotYIM PYONGWON·Filed 2006·Application pending·0 cites
- 1546US2010145513A1Method for monitoring the position of a semiconductor processing robotAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1637US6913670B2Substrate support having barrier capable of detecting fluid leakageAPPLIED MATERIALS INC·Filed 2002·Granted Jul 5, 2005·0 cites·15 claims
- 1730US2002036881A1Electrostatic chuck having composite base and methodFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →