Inventor · disambiguated record
Dana Klein
Also filed as: KLEIN DANA · KLEIN DANA STEPHEN
12 granted patents·3 pending applications·45 citations·filing 2011–2024
88Inventor score
Top patents by PatentIndex Score
15 records- 0191US9329033B2Method for estimating and correcting misregistration target inaccuracyKLA TENCOR CORP·Filed 2013·Granted May 3, 2016·8 cites·17 claims
- 0289US9903711B2Feed forward of metrology data in a metrology systemKLA TENCOR CORP·Filed 2016·Granted Feb 27, 2018·5 cites·33 claims
- 0388US10203200B2Analyzing root causes of process variation in scatterometry metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·7 cites·23 claims
- 0488US9052709B2Method and system for providing process tool correctablesCOHEN GUY·Filed 2011·Granted Jun 9, 2015·11 cites·25 claims
- 0584US10901325B2Determining the impacts of stochastic behavior on overlay metrology dataKLA TENCOR CORP·Filed 2018·Granted Jan 26, 2021·4 cites·28 claims
- 0683US10754260B2Method and system for process control with flexible samplingKLA TENCOR CORP·Filed 2016·Granted Aug 25, 2020·3 cites·30 claims
- 0780US11372340B2Method and system for providing a quality metric for improved process controlKANDEL DANIEL·Filed 2012·Granted Jun 28, 2022·4 cites·22 claims
- 0878US11333982B2Scaling metric for quantifying metrology sensitivity to process variationKLA CORP·Filed 2020·Granted May 17, 2022·2 cites·27 claims
- 0975US11249400B2Per-site residuals analysis for accurate metrology measurementsKLA CORP·Filed 2019·Granted Feb 15, 2022·1 cites·20 claims
- 1069US2023051705A1Method and System for Providing a Quality Metric for Improved Process ControlKLA CORP·Filed 2022·Application pending·0 cites
- 1162US2025369754A1System and method for multi-merit adaptive sampling in overlay metrologyKLA CORP·Filed 2024·Application pending·0 cites
- 1259US2024094639A1High-resolution evaluation of optical metrology targets for process controlKLA CORP·Filed 2022·Application pending·0 cites
- 1341US11725934B2Systems and methods for metrology optimization based on metrology landscapesKLA CORP·Filed 2020·Granted Aug 15, 2023·0 cites·15 claims
- 1439US11447270B2Track filler and methods for installing the track fillerBOEING CO·Filed 2020·Granted Sep 20, 2022·0 cites·20 claims
- 1537US10025756B2Selection and use of representative target subsetsKLA TENCOR CORP·Filed 2014·Granted Jul 17, 2018·0 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →