Inventor · disambiguated record
Akinori Nakano
Also filed as: NAKANO AKINORI
13 granted patents·3 pending applications·3,072 citations·filing 1999–2022
95Inventor score
Top patents by PatentIndex Score
16 records- 0198US9478414B2Method for hydrophobization of surface of silicon-containing film by ALDASM IP HOLDING BV·Filed 2014·Granted Oct 25, 2016·465 cites·6 claims
- 0297US9190263B2Method for forming SiOCH film using organoaminosilane annealingASM IP HOLDING BV·Filed 2013·Granted Nov 17, 2015·518 cites·15 claims
- 0397US9117657B2Method for filling recesses using pre-treatment with hydrocarbon-containing gasASM IP HOLDING BV·Filed 2013·Granted Aug 25, 2015·518 cites·17 claims
- 0497US9029272B1Method for treating SiOCH film with hydrogen plasmaASM IP HOLDING BV·Filed 2013·Granted May 12, 2015·526 cites·17 claims
- 0596US8551892B2Method for reducing dielectric constant of film using direct plasma of hydrogenNAKANO AKINORI·Filed 2011·Granted Oct 8, 2013·518 cites·16 claims
- 0695US9899291B2Method for protecting layer by forming hydrocarbon-based extremely thin filmASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·463 cites·16 claims
- 0788US11482418B2Substrate processing method and apparatusASM IP HOLDING BV·Filed 2018·Granted Oct 25, 2022·4 cites·13 claims
- 0888US7884016B2Liner materials and related processes for 3-D integrationASM INT·Filed 2009·Granted Feb 8, 2011·13 cites·18 claims
- 0986USD851633SMicrophone with built-in speakerTOA CORP·Filed 2017·Granted Jun 18, 2019·28 cites·1 claims
- 1078US7439315B2Polymer film and method for producing the sameNEC CORP·Filed 2005·Granted Oct 21, 2008·4 cites·11 claims
- 1169US7220810B2Polymer film and method for producing the sameASM JAPAN·Filed 2005·Granted May 22, 2007·2 cites·6 claims
- 1269US2023040728A1Substrate processing method and apparatusASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 1347US6261974B1Growth method of a polymer filmNEC CORP·Filed 1999·Granted Jul 17, 2001·13 cites·14 claims
- 1447US2010003833A1Method of forming fluorine-containing dielectric filmASM JAPAN·Filed 2008·Application pending·0 cites
- 1546US7524908B2Copolymerized high polymer film and method of manufacturing the sameNEC CORP·Filed 2005·Granted Apr 28, 2009·0 cites·10 claims
- 1646US2010151151A1Method of forming low-k film having chemical resistanceASM JAPAN·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →