Inventor · disambiguated record
Michel Pharand
Also filed as: PHARAND MICHEL
14 granted patents·10 pending applications·103 citations·filing 1998–2025
91Inventor score
Top patents by PatentIndex Score
24 records- 0182US7560705B2Workpiece handling scan arm for ion implantation systemAXCELIS TECH INC·Filed 2007·Granted Jul 14, 2009·12 cites·22 claims
- 0278US9625368B2Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structureGOODWIN ERIC PETER·Filed 2011·Granted Apr 18, 2017·5 cites·27 claims
- 0375US8376130B2Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transportMURATEC AUTOMATION CO LTD·Filed 2009·Granted Feb 19, 2013·10 cites·19 claims
- 0474US9778579B2System and method for controlling a temperature of a reaction assemblyNIKON CORP·Filed 2012·Granted Oct 3, 2017·3 cites·32 claims
- 0573US7070661B2Uniform gas cushion wafer supportAXCELIS TECH INC·Filed 2003·Granted Jul 4, 2006·18 cites·9 claims
- 0670US7026581B2Apparatus for positioning an elevator tubeAXCELIS TECH INC·Filed 2003·Granted Apr 11, 2006·15 cites·5 claims
- 0769US7828504B2Combination load lock for handling workpiecesAXCELIS TECH INC·Filed 2006·Granted Nov 9, 2010·4 cites·19 claims
- 0863US7151658B2High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layerAXCELIS TECH INC·Filed 2003·Granted Dec 19, 2006·8 cites·46 claims
- 0960US5959305AMethod and apparatus for monitoring charge neutralization operationEATON CORP·Filed 1998·Granted Sep 28, 1999·25 cites·27 claims
- 1059US11955308B1Water cooled, air bearing based rotating anode x-ray illumination sourceKLA CORP·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 1158US2024120235A1Magnetically Opposed, Iron Core Linear Motor Based Motion Stages For Semiconductor Wafer PositioningKLA CORP·Filed 2023·Application pending·0 cites
- 1253US2025372434A1Methods And Systems For Chucking Highly Bowed Semiconductor WafersKLA CORP·Filed 2025·Application pending·0 cites
- 1350US6727509B2Wafer pedestal tilt mechanismFiled 2001·Granted Apr 27, 2004·3 cites·13 claims
- 1450US2025118602A1Metrology system with twin planar motor stageKLA CORP·Filed 2024·Application pending·0 cites
- 1546US10107654B2Rotary probe headNIKON CORP·Filed 2016·Granted Oct 23, 2018·0 cites·20 claims
- 1645US2013069449A1Modular coil arrays for planar and linear motorsNIKON CORP·Filed 2012·Application pending·0 cites
- 1745US2008156679A1Environmental isolation system for flat panel displaysBONORA ANTHONY C·Filed 2007·Application pending·0 cites
- 1843US2015075751A1Fluid distribution network for large stator motorNIKON CORP·Filed 2014·Application pending·0 cites
- 1941US2013140372A1Temperature control of a mover with active bypass, predictive feedforward control, and phase change housingNIKON CORP·Filed 2013·Application pending·0 cites
- 2039US2012062866A1Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current dragBINNARD MICHAEL B·Filed 2011·Application pending·0 cites
- 2135US2004100110A1Ceramic end effector for micro circuit manufacturingAXCELIS TECH INC·Filed 2002·Application pending·0 cites
- 2235US2005110292A1Ceramic end effector for micro circuit manufacturingAXCELIS TECH INC·Filed 2004·Application pending·0 cites
- 2333US7100759B2Magnetic support structure for an elevator tube of a vertical rapid thermal processing unitAXCELIS TECH INC·Filed 2004·Granted Sep 5, 2006·0 cites·30 claims
- 2432US10451982B2Actuator assembly including magnetic sensor system for vibrationless position feedbackNIKON CORP·Filed 2018·Granted Oct 22, 2019·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Michel Pharand files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →