Inventor · disambiguated record
Hidehito Azumano
Also filed as: AZUMANO HIDEHITO
7 granted patents·1 pending application·90 citations·filing 1998–2020
80Inventor score
Top patents by PatentIndex Score
8 records- 0180US6045315ARobot apparatus and treating apparatusSHIBAURA ENG WORKS LTD·Filed 1998·Granted Apr 4, 2000·80 cites·6 claims
- 0276US11387082B2Plasma processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Jul 12, 2022·2 cites·16 claims
- 0375US11387083B2Plasma processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Jul 12, 2022·2 cites·13 claims
- 0472US8834674B2Plasma etching apparatusMOTOKAWA TAKEHARU·Filed 2010·Granted Sep 16, 2014·5 cites·8 claims
- 0555US11437224B2Plasma processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2020·Granted Sep 6, 2022·0 cites·18 claims
- 0653US8434993B2Robot apparatus and processing apparatus provided therewith, ashing system, and ashing methodAZUMANO HIDEHITO·Filed 2007·Granted May 7, 2013·1 cites·4 claims
- 0740US2015090296A1Substrate processing device and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Application pending·0 cites
- 0839US10111313B2Plasma processing apparatus and plasma processing methodSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Oct 23, 2018·0 cites·9 claims
Join the waitlist — get patent alerts
Get an alert when Hidehito Azumano files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →