Inventor · disambiguated record
Matthew Lent
Also filed as: LENT MATTHEW · LENT MATTHEW HARRIS
11 granted patents·1 pending application·107 citations·filing 2001–2024
89Inventor score
Top patents by PatentIndex Score
12 records- 0192US7838833B1Apparatus and method for e-beam dark imaging with perspective controlKLA TENCOR TECH CORP·Filed 2007·Granted Nov 23, 2010·29 cites·20 claims
- 0291US9696435B2Hybrid energy conversion and processing detectorGATAN INC·Filed 2015·Granted Jul 4, 2017·8 cites·15 claims
- 0385US9966220B2Electron energy loss spectrometer using direct detection sensorGATAN INC·Filed 2017·Granted May 8, 2018·5 cites·17 claims
- 0484US6722026B1Apparatus and method for removably adhering a semiconductor substrate to a substrate supportKLA TENCOR CORP·Filed 2001·Granted Apr 20, 2004·37 cites·20 claims
- 0583US7879730B2Etch selectivity enhancement in electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted Feb 1, 2011·11 cites·19 claims
- 0680US7709792B2Three-dimensional imaging using electron beam activated chemical etchKLA TENCOR TECH CORP·Filed 2007·Granted May 4, 2010·7 cites·21 claims
- 0773US10215865B2Hybrid energy conversion and processing detectorGATAN INC·Filed 2017·Granted Feb 26, 2019·1 cites·13 claims
- 0872US2024355943A1Electronic imaging detector with thermal conduction layerGATAN INC·Filed 2024·Application pending·0 cites
- 0967US6995369B1Scanning electron beam apparatus and methods of processing data from sameKLA TENCOR TECH CORP·Filed 2004·Granted Feb 7, 2006·7 cites·18 claims
- 1064US12057515B2Electronic imaging detector with thermal conduction layerGATAN INC·Filed 2020·Granted Aug 6, 2024·0 cites·10 claims
- 1162US8052885B2Structural modification using electron beam activated chemical etchKLA TENCOR CORP·Filed 2007·Granted Nov 8, 2011·2 cites·18 claims
- 1256US10535492B2Electron energy loss spectrometer using direct detection sensorGATAN INC·Filed 2018·Granted Jan 14, 2020·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →