Inventor · disambiguated record
Jeroen Pieter Starreveld
Also filed as: STARREVELD JEROEN · STARREVELD JEROEN PIETER
15 granted patents·54 citations·filing 2003–2020
88Inventor score
Files withASML NETHERLANDS BV12BUTLER HANS1STARREVELD JEROEN PIETER1VAN DER TOORN JAN-GERARD CORNELIS1
Top patents by PatentIndex Score
15 records- 0185US7595496B2Optimized correction of wafer thermal deformations in a lithographic processASML NETHERLANDS BV·Filed 2007·Granted Sep 29, 2009·7 cites·15 claims
- 0282US9715171B2Imprint lithographic apparatus and imprint lithographic methodBUTLER HANS·Filed 2010·Granted Jul 25, 2017·4 cites·11 claims
- 0382US7250237B2Optimized correction of wafer thermal deformations in a lithographic processASML NETHERLANDS BV·Filed 2003·Granted Jul 31, 2007·19 cites·24 claims
- 0479US7119884B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 10, 2006·17 cites·12 claims
- 0573US8184266B2Lithographic apparatus and device manufacturing methodSTARREVELD JEROEN PIETER·Filed 2009·Granted May 22, 2012·5 cites·11 claims
- 0670US9977349B2Support device, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 22, 2018·2 cites·15 claims
- 0755US11828344B2Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Nov 28, 2023·0 cites·20 claims
- 0855US11422477B2Vibration isolation system and lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 23, 2022·0 cites·20 claims
- 0952US11550227B2Projection system and lithographic apparatus comprising said projection systemASML NETHERLANDS BV·Filed 2019·Granted Jan 10, 2023·0 cites·19 claims
- 1046US11269262B2Frame assembly, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 8, 2022·0 cites·20 claims
- 1146US11169450B2Pneumatic support device and lithographic apparatus with pneumatic support deviceASML NETHERLANDS BV·Filed 2019·Granted Nov 9, 2021·0 cites·20 claims
- 1244US10838312B2Lithographic apparatus, lithographic projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Nov 17, 2020·0 cites·17 claims
- 1344US10816910B2Vibration isolator, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 27, 2020·0 cites·27 claims
- 1441US10503086B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 10, 2019·0 cites·15 claims
- 1539US9097990B2Lithographic apparatus and stage systemVAN DER TOORN JAN-GERARD CORNELIS·Filed 2012·Granted Aug 4, 2015·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →