Assignee
BUTLER HANS
NL·27 granted patents·117 citations·filing 2008–2012
Top patents by PatentIndex Score
27 records- 0194US8705004B2Lithographic method and apparatusBUTLER HANS·Filed 2010·Granted Apr 22, 2014·20 cites·10 claims
- 0294US8319940B2Position measurement system and lithographic apparatusBUTLER HANS·Filed 2008·Granted Nov 27, 2012·18 cites·22 claims
- 0388US8730451B2Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping methodBUTLER HANS·Filed 2011·Granted May 20, 2014·6 cites·17 claims
- 0488US8164737B2Lithographic apparatus having an active damping subassemblyBUTLER HANS·Filed 2008·Granted Apr 24, 2012·11 cites·17 claims
- 0587US9229339B2Positioning system, a lithographic apparatus and a method for positional controlBUTLER HANS·Filed 2011·Granted Jan 5, 2016·4 cites·9 claims
- 0682US9715171B2Imprint lithographic apparatus and imprint lithographic methodBUTLER HANS·Filed 2010·Granted Jul 25, 2017·4 cites·11 claims
- 0781US8144310B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2009·Granted Mar 27, 2012·5 cites·17 claims
- 0880US9110387B2Lithographic apparatus comprising a substrate table and a surface substrate actuatorBUTLER HANS·Filed 2012·Granted Aug 18, 2015·3 cites·15 claims
- 0980US8553199B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Oct 8, 2013·6 cites·22 claims
- 1079US8243258B2Lithographic apparatus having acoustic resonatorBUTLER HANS·Filed 2008·Granted Aug 14, 2012·5 cites·25 claims
- 1174US9195128B2Enhancing alignment in lithographic apparatus device manufactureBUTLER HANS·Filed 2010·Granted Nov 24, 2015·2 cites·18 claims
- 1274US8908146B2Actuator system, lithographic apparatus, and device manufacturing methodBUTLER HANS·Filed 2009·Granted Dec 9, 2014·3 cites·15 claims
- 1374US8446567B2Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage systemBUTLER HANS·Filed 2009·Granted May 21, 2013·3 cites·19 claims
- 1473US8619232B2Method for damping an object, an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2009·Granted Dec 31, 2013·3 cites·16 claims
- 1573US8059259B2Damping arrangement, active damping system, lithographic apparatus, and projection assemblyBUTLER HANS·Filed 2008·Granted Nov 15, 2011·6 cites·17 claims
- 1671US9378722B2Lithographic apparatus with actuator to compensate acoustic vibrationBUTLER HANS·Filed 2008·Granted Jun 28, 2016·6 cites·28 claims
- 1770US8994919B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Mar 31, 2015·2 cites·18 claims
- 1869US9122173B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2012·Granted Sep 1, 2015·1 cites·16 claims
- 1968US9261799B2Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable objectBUTLER HANS·Filed 2009·Granted Feb 16, 2016·2 cites·30 claims
- 2068US8245824B2Combination of structure and an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2008·Granted Aug 21, 2012·4 cites·20 claims
- 2166US9746312B2Lithographic apparatus and method for measuring a positionBUTLER HANS·Filed 2011·Granted Aug 29, 2017·2 cites·17 claims
- 2264US8743344B2Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second objectBUTLER HANS·Filed 2009·Granted Jun 3, 2014·1 cites·19 claims
- 2358US8913229B2Multi-stage system, a control method therefor, and a lithographic apparatusBUTLER HANS·Filed 2012·Granted Dec 16, 2014·0 cites·15 claims
- 2449US8493553B2Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frameBUTLER HANS·Filed 2009·Granted Jul 23, 2013·0 cites·15 claims
- 2542US8781775B2Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatusBUTLER HANS·Filed 2011·Granted Jul 15, 2014·0 cites·16 claims
- 2641US8922749B2Lithographic apparatus and patterning deviceBUTLER HANS·Filed 2010·Granted Dec 30, 2014·0 cites·12 claims
- 2741US8717532B2Active mount, lithographic apparatus comprising such active mount and method for tuning such active mountBUTLER HANS·Filed 2010·Granted May 6, 2014·0 cites·17 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →