Inventor · disambiguated record
Tomoyuki Nagata
Also filed as: NAGATA TOMOYUKI
13 granted patents·4 pending applications·23 citations·filing 2011–2024
85Inventor score
Top patents by PatentIndex Score
17 records- 0178US10934618B2Substrate processing apparatus, substrate loading method, and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 2, 2021·2 cites·16 claims
- 0276US10014199B2Wafer boat support table and heat treatment apparatus using the sameTOKYO ELECTRON LTD·Filed 2016·Granted Jul 3, 2018·2 cites·18 claims
- 0373US9293323B2Method of forming silicon filmTOKYO ELECTRON LTD·Filed 2013·Granted Mar 22, 2016·3 cites·9 claims
- 0470USD800080SReactor tube for semiconductor production devicesTOKYO ELECTRON LTD·Filed 2016·Granted Oct 17, 2017·14 cites·1 claims
- 0568US10359757B2Control logic diagram analysis device and control logic diagram analysis methodMITSUBISHI ELECTRIC CORP·Filed 2015·Granted Jul 23, 2019·1 cites·6 claims
- 0664US10636627B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Apr 28, 2020·1 cites·8 claims
- 0759US2024309508A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0859US2024332043A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0958US2024332047A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1056US12438055B2Abnormality detection method and processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 7, 2025·0 cites·9 claims
- 1147US2013328306A1Joint member, joint, substrate processing apparatus and limit memberTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1245US11361125B2Support method, design support apparatus, and a non-transitory recording medium storing a design support programMITSUBISHI ELECTRIC CORP·Filed 2017·Granted Jun 14, 2022·0 cites·15 claims
- 1344US10347024B2Control logic diagram creation support apparatusMITSUBISHI ELECTRIC CORP·Filed 2016·Granted Jul 9, 2019·0 cites·3 claims
- 1443US11846023B2Injector and substrate processing apparatus using the same, and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 19, 2023·0 cites·7 claims
- 1543US9263256B2Method of forming seed layer, method of forming silicon film, and film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Feb 16, 2016·0 cites·11 claims
- 1639US9756732B2Device embedded substrate and manufacturing method of device embedded substrateMEIKO ELECTRONICS CO LTD·Filed 2013·Granted Sep 5, 2017·0 cites·9 claims
- 1726US9208016B2Message sequence generation method and message sequence generation deviceNAGATA TOMOYUKI·Filed 2011·Granted Dec 8, 2015·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →