USD800080SActiveUtility

Reactor tube for semiconductor production devices

70
Assignee: TOKYO ELECTRON LTDPriority: Mar 30, 2016Filed: Sep 20, 2016Granted: Oct 17, 2017
Est. expiryMar 30, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:Tomoyuki Nagata
70
PatentIndex Score
14
Cited by
10
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a reactor tube for semiconductor production devices, as shown and described.

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