Inventor · disambiguated record
Vincent W. Tsang
Also filed as: TSANG VINCENT · TSANG VINCENT W
14 granted patents·3 pending applications·45 citations·filing 2005–2023
89Inventor score
Top patents by PatentIndex Score
17 records- 0196US11235935B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2021·Granted Feb 1, 2022·3 cites·33 claims
- 0294US10978330B2On the fly automatic wafer centering method and apparatusBROOKS AUTOMATION INC·Filed 2018·Granted Apr 13, 2021·14 cites·30 claims
- 0392US10134623B2On the fly automatic wafer centering method and apparatusBROOKS AUTOMATION INC·Filed 2016·Granted Nov 20, 2018·9 cites·25 claims
- 0489US12162698B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Dec 10, 2024·1 cites·33 claims
- 0585US11776834B2On the fly automatic wafer centering method and apparatusBROOKS AUTOMATION INC·Filed 2021·Granted Oct 3, 2023·1 cites·17 claims
- 0685US7405396B2Sample handling mechanisms and methods for mass spectrometryAPPLERA CORP·Filed 2005·Granted Jul 29, 2008·13 cites·20 claims
- 0781US10651067B2Method and apparatus for substrate transport apparatus position compensationBROOKS AUTOMATION INC·Filed 2018·Granted May 12, 2020·2 cites·36 claims
- 0878US2024112937A1On the fly automatic wafer centering method and apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 0976US11192239B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2019·Granted Dec 7, 2021·1 cites·30 claims
- 1075US2024001535A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 1175US2024105493A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 1273US11972965B2Method and apparatus for substrate transport apparatus position compensationBROOKS AUTOMATION INC·Filed 2022·Granted Apr 30, 2024·0 cites·30 claims
- 1373US11691267B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2021·Granted Jul 4, 2023·0 cites·20 claims
- 1472US11823944B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Nov 21, 2023·0 cites·24 claims
- 1571US11270904B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2017·Granted Mar 8, 2022·1 cites·34 claims
- 1668US11251059B2Method and apparatus for substrate transport apparatus position compensationBROOKS AUTOMATION INC·Filed 2020·Granted Feb 15, 2022·0 cites·30 claims
- 1755US12206342B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Jan 21, 2025·0 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →